【作者】 杨永江；

【导师】 邱宗明； 郭彦珍；

【作者基本信息】 西安理工大学 ， 测试计量技术及仪器， 2008， 硕士

【摘要】 导轨直线度误差直接影响到工件的加工精度,所以导轨直线度误差的测量是工业测量领域里一个非常重要的项目。目前的各种直线度测量方法中,激光准直测量法由于其实现简单,成本低廉,分辨率高等优点而备受关注。但传统的以光强为基准的测量方法由于容易受到光束衍射,光强变化、光靶倾斜等情况的影响,其精度并不高。由于偏振光的偏振态不易受到光强、环境等因素的影响,所以本研究室提出了利用线偏振光测量导轨直线度的方法。但原光是以磁光调制原理进行偏振角调制的,结构复杂,调制效果也不够理想。鉴于此,本文提出了一种简单的,基于偏振干涉原理的线偏振光横向调制技术,并设计了利用该调制光束进行导轨直线度误差测量的相应方法,为利用偏振光进行导轨直线度的测量提供了一种新的思路。另外,为了配合直线度的测量,本文还提出了一种基于偏振分光原理的偏振角检测方法。这种方法的最大优点是可以消除光强变化对测量的影响,且较以往相位检测法等实现起来更加方便。本文从原理上对两套方法作了深入的理论分析,并进行了大量的方案论证。通过实验对光缝宽度等光学参数进行了确定。文章最后根据实验数据对整套方法在导轨直线度测量方面的应用效果作了检验及误差分析。实验表明,该方法是一种可行的测量直线度的方法,值得进一步开发和研究。更多还原

【Abstract】 Guide straightness error can affect the manufacture accuracy of work piece directly. And straightness error measurement is a great important object in industrial measurement.Laser alignment measurement has been paid more and more attention for its easy, lower cost and high accuracy among methods of measuring the guide straightness error. However, with the reference being light intensity, accuracy of traditional alignment measurement is not ideal because the light intensity is easy to be distributed by beam diffraction, light intensity variation and light target’s inclination. Polarization state can be considered as a good reference because of its resistant against light intensity and external environment. A measurement with linear polarized light was proposed by our lab. Original modulation for the polarized light is based on magneto-optical modulation which is very complex and expensive to carry out, and the result of that is not ideal. So, a new and simple modulation based on polarization interference is introduced in this paper. And a new method of measuring the guide straightness error with this modulated beam is also introduced correspondingly. Additionally, another new method based on polarization beam splitting is introduced to measure the polarization angle. Advantage of this method is that it can eliminate the effect of light intensity and is easier to carry out.The paper does a deeply analyze in theory for the methods and does a large number of schemes demonstration too. Some experiment parameters such as width of optical slit are made sure through experiment. And an evaluation and error analyze also are finished in the end through experiment. The experiment data shows that the methods are feasible to measure the guide straightness error, and it is worth while to study more deeply.更多还原