【作者】 张强；

【导师】 余晓芬；

【作者基本信息】 合肥工业大学 ， 精密仪器及机械， 2008， 硕士

【摘要】 随着现代传感技术与微纳米测量技术的迅速发展,对高精度位移测量的需求与研究越来越多。光栅式位移传感器以其量程大、精度和分辨率高、能用于动态测量、易于实现数字化、便于安装和调整等众多独特的优点越来越普遍地受到人们的关注;而市场上有售的光栅测头仍多为国外产品,且价格昂贵,难以推广应用。因此研制低成本的高精度光栅测头具有较大的实用价值和很好的应用前景。本学位论文自主研制了一种光栅式位移测头;在结构设计过程中,一方面遵循了阿贝原则,另一方面基于动态力平衡原理,提出了一种在一定测量范围内保持测量力近似恒定的结构设计方法;研制了一套包括电机驱动部分和支撑部分在内的试验装置;最后对测头进行了特性标定试验。试验结果表明,该测头在10mm示值范围内具有亚微米量级的测量不确定度,制造成本仅为同特性产品价格的1/5左右;若进一步提高零件的机械加工精度,该光栅测头的精度还可进一步提高。更多还原

【Abstract】 With the rapid development of modern sensor technology and micro/nano measurement technology, the demand and research for high-precision displacement measurement has increased dramatically. Optical grating displacement sensor ,with its various unique virtues of long range, high precision and resolution, capability of dynamic measurement application, easily digital implementation, convenience for fixing and adjusting, etc, is attracting the attention from people more and more popularly. The optical grating probes sold in markets are still predominantly foreign products, which have expensive cost and are difficult for popularization. So developing low cost high-precision optical grating probes has great practical value and good application prospect.An optical grating displacement probe was independently designed in this degree thesis. In the course of structure design, Abbe’s principle was followed on the one hand; On the other hand, based on the principle of dynamic force balance, a structure design method of maintaining approximately constant measuring force in a certain range measurement was put forward. An experimental equipment involving motor drive and support structure was developed. A characteristic calibration experiment of the probe was completed at last. The test results indicated that the probe showed the measurement uncertainty of sub micrometer in the reading range of 10mm, and its manufacturing cost was only about one fifth of the prices of products with the same characteristics. If the mechanical processing accuracy of the parts were further enhanced, the precision of the optical grating probe would be further improved.更多还原