【作者】 翁妍；

【导师】 汪辉； 多新中；

【作者基本信息】 上海交通大学 ， 软件工程， 2008， 硕士

【摘要】 CMOS射频集成电路中,平面螺旋差分电感是一种必不可少的无源片上元件。但是在高频阶段,这类电感会受到四种高频效应的影响:趋肤效应和邻近效应,导体间的寄生电容,容性衬底耦合,感性衬底耦合。这些效应降低了差分电感的高频特性,特别是品质因素,并且也给精确建模带来了困难。目前工业界缺乏差分电感的参数化等效电路模型,特别是详细的模型参数抽取过程分析。本文首先分析了差分电感的线圈参数对电感性能的影响,给出了电感线圈参数优化的方法;然后从差分电感的四种高频效应的物理含义出发,建立八角形平面螺旋差分电感的参数化等效电路模型。等效电路模型只有与差分电感的物理意义紧密结合才能实现参数化,才能适用于不同的晶圆代工厂、不同工艺的电感,才能预测工艺改变后的电感性能。建模时首先对平面螺旋差分电感建立一个能正确模拟端口特性的“2-π”等效电路拓扑;然后提出一套解析公式使得电路中每个元件值跟工艺参数和器件的几何尺寸建立解析关系;适当引入到公式里的一组模型参数需要根据几个特定的测试电感的实测数据来优化与校准,以往没有文献对平面螺旋差分电感的“2-π”等效电路模型的模型参数的抽取方法进行详细的分析,因此我在实验过程中发展了一套模型参数抽取的方法并对其进行了分析。经实测数据验证,本论文的参数化等效电路模型的模拟精度和速度都令人满意;并且该参数化等效电路模型与差分电感的物理意义结合紧密,因此具有较宽的应用范围。更多还原

【Abstract】 Differential spiral inductors are one kind of on-chip passive components, which plays a critical role in modern CMOS RFICs. However, at high frequencies, such inductors suffer from four kinds of high frequency effects: skin and proximity effects, parasitic capacitances between metal windings, capacitive substrate coupling, and inductive substrate coupling. These high frequency effects not only degrade performances of inductors at high frequencies, especially quality factor (Q), but also make the modeling work quite difficult. Now industry lacks a physically-based scalable compact circuit model, especially the detailed analysis of extracting model parameters.In this thesis, the effects of varying geometrical parameters on the performance of differential spiral inductors was investigated and the method of optimizing dimension quantities was given; And then based on the physical insights of the above high frequency effects, I have developed a scalable compact circuit model for octagonal differential spiral inductors. Only combined closely with the physical meaning of the differential inductors, the compact circuit model can achieve scalable, can be applied to different foundries and processes, and can be used to predict performances of differential inductors even the processes are changed. The first step of making a model is that a 27-element“2-π”circuit topology is proposed which includes all four kinds of effects, and provides correct port behaviors vs. frequencies. And then I developed a set of analytical formulas which correlates the values of circuit elements in circuit topology with the technology parameters and device’s geometric dimensions. Some model parameters properly introduced to the formulas need to be optimized and calibrated based on the fitting to the measurement data of several testing devices. In the past, there was no literature gave detailed analysis of the model parameter extraction method of“2-π”scalable compact circuit model for differential inductors. So I developed the method of model parameter extraction during the experiment and gave analysis about it in this paper.Through the validation of measurement data, the speed and accuracy of the scalable compact circuit model are satisfying, and because of its close combination with the physical insights of the differential inductors, the scalable compact circuit model has a wide scope of application.更多还原