【作者】 王培超；

【导师】 褚金奎；

【作者基本信息】 大连理工大学 ， 机械电子工程， 2008， 硕士

【摘要】 随着MEMS的发展，微能源逐渐成为MEMS应用中的一个关键问题。现有的各种微能源由于其体积、使用寿命、环境适应能力、集成性等方面的制约，无法满足MEMS器件对能源的需求。基于β辐射伏特效应的PN结同位素微电池具有体积小、结构简单、工作稳定性好、寿命长、能量密度高、抗干扰性强等优点，并且不需要补充燃料，因此逐渐成为微能源研究的方向。能量转换结构是同位素微电池的核心器件，其性能决定了同位素微电池的转换效率，因此提高能量转换结构的性能成为研究的重点。本文针对基于β辐射伏特效应的PN结同位素微电池的能量转换结构进行了优化设计，设计了表面电极版图，并对能量转换结构的加工工艺进行了研究。论文的主要内容包括：首先介绍了同位素微电池的结构和工作原理，包括同位素微电池的分类、电子空穴对的产生过程、复合机构以及载流子的输运过程。其次，对同位素微电池的能量转换结构进行了优化设计，通过在表面制作倒金字塔和V型槽结构，使电池表面积增加至原来的1.73倍。同时通过设计选择性发射极结构，有望提高同位素微电池的性能。并在此基础上使用L-EDIT软件进行了版图设计。最后，对同位素微电池的制作工艺特别是表面电极的制作工艺进行了深入研究。通过使用硅片模具代替现有的金属模具制作微电池的表面电极，解决了金属离子污染问题。后来又针对硅片模具容易破碎的缺点，开发了一种利用SU8胶剥离工艺制作具有三维表面形貌的同位素微电池的表面电极的新工艺，通过使用BP212正胶作为牺牲层，有效的解决了沟槽中的SU8胶不易去除的难题，成功的制作出了倒金字塔式和沟槽式同位素微电池样件。经过测试，获得了令人满意的输出特性。更多还原

【Abstract】 As the development of MEMS (Micro Electro Mechanical System), Micro power becomes a key problem in MEMS application gradually. Conventional micro power can not meet the energy requirement of MEMS because of restrict of volume, life-time, adaptation for environment, integration, and so on. Radioisotope Micro Battery based onβ-radio-voltaic effect has the characteristics of little volume, sample structure, high stability, long life-time, high density of energy, robust, and so on, more importantly, in the course of application, it does not need frequently to supply materials or energy for them, thus become the research direction of micro power. Energy convert structure is the core of Radioisotope Micro Battery, and its performance affects the efficiency of the Radioisotope Micro Battery seriously, thus it is important to improve the efficiency of the energy convert structure.In this thesis, optimization of the energy convert structure of Radioisotope Micro Battery based onβ-radio-voltaic effect is performed, mask of the metal contacts is designed, and the fabrication process is investigated at the same time. The main content is as follows:Firstly, the structure and work principle of Radioisotope Micro Battery are introduced, including the sort of Radioisotope Micro Battery, the generation, recombination and transmission of electron-hole pairs.Secondly, the energy convert structure is optimized; the surface area is increased to 173% via etching inverted pyramid and channel array. And the performance is expected to be improved by selective emitter structure. At the same time, mask design is performed use L-EDIT.Finally, fabrication process of Radioisotope Micro Battery, especially of the metal contacts is investigated. MIC is avoided through use Si mold. And a new process for the fabrication of the metal contacts of Radioisotope Micro Battery using lift-off process with SU8 photo resist is proposed, via using BP212 photo resist as a sacrificial layer, SU8 in the channels is removed effectively. Radioisotope Micro Battery with inverted pyramid and channel array is fabricated successfully. Satisfied output characteristic is obtained.更多还原