DeltaV系统在半导体厂务系统中的应用分析

【作者】 任跋；

【导师】 郑骏；

【作者基本信息】 华东师范大学 ， 软件工程， 2007， 硕士

【摘要】 当前，现场总线技术已经成为自动化技术发展的热点，在产业化方面已经走向成熟。其中艾默生(Emerson Management)过程管理公司于1996年推出的DeltaV系统应该算是现场总线系统中最为成功的总线系统之一。迄今为止，该系统在全球已经签订了上千套供应合同，在业界受到广泛的欢迎。然而就半导体业这个敏感而较为保守的行业来说，任何材料及设备都需要经过长期的论证评判，才能被业界所接受。因此业界仍然持续沿用旧有系统。唯有在新厂建设时评估这套新的系统并将之付诸实施才是对“DeltaV系统在半导体行业的厂务系统中是否能得到成功地实施”作出论证的有效途径。本文正是通过此次大胆尝试将DeltaV作为新的厂务监控系统并予以实施，从而切实论证其是否能符合半导体生产行业需求，并能在这一领域中发挥其强大的功能。目前工控业界使用较广泛的DCS主要有：Yokogawa的Stardom，Honeywell的PKS，Siemens的PCS7、Emerson的PROVOX、RS3、DeltaV系统。在以往半导体厂务FMCS系统的应用中较为多见的是PROVOX。厂务控制系统对于半导体厂厂务部门来说可谓是其心脏，它控制了FAB内多种危险性化学品的安全使用。系统的一点小小的差错可能导致死亡事故或者数百上千万美金的财产损失，因此构建一个稳定而智能的系统对于半导体厂极为重要。在过去多年的建厂案例中，厂务监控系统架构均使用PROVOX系统，但该系统存在的缺点比较明显，尤其在整合其他PLC系统时兼容性不佳，系统不易升级导致新功能无法使用，Spare Parts供应不足且成本较高，发生问题后Trouble-shooting也较困难。因此寻找一个可以解决现有缺点的替代产品对于半导体厂务系统不断提升其品质尤为重要。Emerson的Plant Web作为新一代DCS，其代表作DeltaV很好提供了解决传统PROVOX系统之缺点的方案。本文首先分析了国内外工控界的现状及半导体行业对于工控系统的要求。接着分析了DeltaV系统推出的背景及其本身的特点，比较了其与以往工控软件的不同之处，说明了其在工控界的领先地位和其基于现场总线的控制系统的特点。随后，结合对新建半导体厂尝试使用DeltaV作为厂务监控系统架构这一实践应用的研究，从网络架构、软件及硬件的具体实现论证了这种基于现场总线的DCS在半导体行业的适用性及优越性。最后本文根据基于DeltaV厂务体系特色以及不足之处，增加了对于半导体企业来说最为关键的自动加减机功能及Zero Mo功能，开发设计了Alarmcall out的模块，增添了PID Fuzzy-Auto tuning，Advanced Loop Function。为系统满足半导体行业的设计改进提供了借鉴并为今后DCS发展方向提供了宝贵的经验。更多还原

【Abstract】 Nowadays, Foundation Field bus technology becomes a hot spot of the automation industry. It approaches a more decent way. Among them, DeltaV system released by Emerson Management on 1996 is the most successfully bus system. Till now, this system is sold to many companies all over the world. However, when talking about the relatively sensitive and old-fashioned IC industry, whether or not a certain material or equipment can be accepted needs a very long term verification time frame. So far, the industry is still mainly using the old systems. Therefore, the best way to verify this DeltaV system is to build it up with a newly created Fab. This article is going to prove if this DeltaV system can meet the requirement of the semi-conductor industry by implement the system as the facility monitoring system. And prove it to be very powerful in this field.Currently, widely used industry control system includes the following: Stardom from Yokogawa, PKS from Honeywell, PCS7 from Siemens, Provox/RS3/DeltaV system from Emerson. PROVOX is widely used in those old semi-conductor facility FMCS systems. Facility system is the very core part of the semi-conductor company. The stability of the system directly impacts the life of the people working in it. It controls the usage of multiple dangerous chemical materials in the FAB. A very tiny mistake might lead to thousands of millions cost. Thus, to build up a stable and smart system is extremely important to the semi-conductor company. During the past several years, the main infrastructure of the facility system uses the Provox system. The shortcoming of the system is very obvious. Especially incompatible problems when integrated with other PLC systems, malfunctioning when short of upgradable version, high cost when spare parts is out of stock and the difficulty to do troubleshooting when problem occurs. To find a replacement for this is very important to the semi-conductor company. Based on this goal, we would like to discuss the possibility and advantage of replace the traditional Provox system by the DeltaV system by practical research of using it in my company’s facility system. Plant Web from Emerson is the fourth generation of the DCS. The DeltaV provide a very good method to resolve the problem among the traditional Provox system.Firstly, this article analyzes the current industry status all over the world and the requirement of semi-conductor companies.Secondly, it talks about the background of the DeltaV system and its specialties. We compared it with several other industry control systems. Therefore the leadership of the control systems in this field is proved.After that, by researches over the implementation of the DeltaV system in the semi-conductor facility monitoring system and real implementation of network infrastructure and software/hardware deployment proved the advantages and adoptions of this foundation field bus based DCS system in the semi-conductor industry. Finally, this article describes the added modules including: Zero Mo function、Alarm call out function、PID Fuzzy-Auto tuning, Advanced Loop function. This contributes a lot to the revision of any future DCS system design of the semi-conductor industry.更多还原