【作者】 高兴宇；

【导师】 伍世荣；

【作者基本信息】 桂林电子科技大学 ， 机械制造及其自动化， 2006， 硕士

【摘要】 共焦显微镜由于采用了“共焦”技术而获得了比普通光学显微镜更高的分辨率和信噪比,并且能够对样品进行三维成像。激光共焦扫描显微镜在生物医学、材料科学、微电子制造和精密测量等领域有着广泛的应用。目前大多数共焦显微镜都采用点共焦扫描。本论文提出了一种新型线结构光共焦扫描显微系统,包括以下内容:1、以傅立叶光学和光学传递函数理论为基础,讨论了点共焦显微术三维相干函数和线结构光共焦显微术的交叉传递函数,分析了影响成像分辨率的因素。2、设计了线结构光共焦扫描显微成像光学系统,使用光学设计软件OSLO设计了专用的无限远像距半平场显微物镜和激光扩束准直镜。3、设计了采用光栅反馈闭环控制的机械工作台移动平面扫描和步进电机控制、精密齿轮传动的物镜移动轴向扫描系统。4、设计了线结构光共焦扫描显微系统整体结构,对线结构光共焦成像进行了实验研究,结果证明了线结构光共焦可以明显减小杂散光的影响,增强图像清晰度和对比度,且具有层析能力。经过两年多的研究工作,掌握了共焦显微术的理论,并初步设计出线结构光共焦扫描显微实验装置,为接下来进一步提高成像分辨率和图像处理软件的开发打下良好的基础。更多还原

【Abstract】 The confocal microscope can attain higher resolution and signal-to-noise ratio than ordinary optical microscope due to its“confocal”technique, and can make 3D images for the samples. Laser confocal scanning microscopes are widely applied in the areas of biomedicine, material science, microelectronic manufacture and precise measurement.Most types of confocal microscopes are using point cofocal scanning, while this dissertation presents a new type of line constructive laser confocal scanning microscope system. The main topics including:1、Point confocal microscopy 3D coherent transfer function(CTF) and line constructive laser confocal microscopy transmission cross-coefficient(TCC) are discussed based on Fourier optics and optical transfer function theory. The elements that affect the resolution of the image are analyzed.2、The optical system of line constructive laser confocal scanning microscope is designed. The optical design software OSLO is used to design special infinite image distance half flat field objective as well as laser extender and collimating lens.3、A machinery working platform movement flat scanning system that applies optical grating feedback closed loop control and an objective moving axial scanning system that applies stepping motor control and precise gear driving are developed.4、The integer configuration of the ling construction beam confocal microscope system is designed. The effect of light constructive laser confocal image is researched in experiment. The result testified that the line constructive laser confocal imaging can diminish the effect of stray light obviously, and the image articulation and contrast are improved. The system also has the ability of optical sectioning.During the two year’s research work, we mastered the theory of confocal microscopy, and designed an experimental line constructive laser confocal scanning microscope device. All these works formed a nicer basis for the next work of improving imaging resolution and the development of image processing software.更多还原