数字散斑相关技术在鼓膜测试中的应用

【作者】 吴斌；

【导师】 鲁阳；

【作者基本信息】 浙江大学 ， 一般力学与力学基础， 2006， 硕士

【摘要】 薄膜力学性能是当今MEMS技术中一个很重要的参数，对于微结构器件的研究和应用有很大的影响。半个多世纪以来，鼓膜实验(Bulge test)测试技术被广泛地运用于薄膜的力学性能测试中。论文期间，本人用数字散斑相关方法(DSCM)对传统的鼓膜实验进行了改进，简化了实验条件和环境，并完成了一系列的验证实验。 论文首先对数字散斑相关方法和薄膜力学性能测试技术分别进行文献调研，了解这两种方法的当今的运用与发展情况。然后根据他们各自的特点与长处，把这两种方法结合起来。设计在薄膜中心制作一个标志点，并在加载过程中，通过长距离显微镜从侧面观测标志点的变化来测出薄膜中心的挠度(也就是离面位移)。目的在于更有效方便地完成鼓膜实验，简化传统方法的实验条件。 期间，先设计了相关的验证实验，证明了该实验方法是可以从侧面测定带标志点物体的离面位移变化。然后，设计并完成了0.2mm黄铜薄板的鼓膜实验，包括实验平台的设计制作，微型压力传感器的设计制作。实验结果虽然不是十分理想，但整个过程已经证明该实验方法可以用于薄膜的鼓膜实验，并且通过光学显微系统，可以达到更高的精度。本文还统计分析了图像质量对数字散斑相关方法搜索的影响，对标志点的制作有实际参考意义。 最后基于该实验研究体会，提出了改进鼓膜实验测试平台的技术改进的建议。更多还原

【Abstract】 Mechanical properties of thin films are important parameters for MEMS technologies, and affect the research and the use of micro structures. Since more than half a century ago, bulge test technology has been widely used in the thin film test. During this thesis, the author improved the traditional bulge test technology with Digital Speckle Correlation Method (DSCM), simplified the experimental conditions, and finished some validation test.Firstly the author started with the literature survey about DSCM and thin film test technology, and knew about the use and development direction of these two methods respectively. Secondly I combined these two methods according to their own characteristics. I made a symbol point in the center of the film, and detected the different locations of the symbol point with DSCM in the flank direction by long space microscope to detect the center delfection (out-of-plain displacement) of the film when loading. It is a easy way to finish the bulge test and simplify the traditional experimental conditions.During the thesis, I designed and finished some validation experiment to prove the useful method in the detection of out-of-plain displacement in the flank direction. Then I completed a brass film bulge test of 0.2mm thickness, including the design and manufacture of the experiment flat and a micro-pressure sensor. Although the final test result is not quite satisfied, the full process has proved the useful of this method in the bulge test of thin film. With higher magnified microscope, it will reach higher test precision. The thesis has statistically analyzed the affections of digital image quality in DSCM searching, and it will be referenced meaning in symbol point making.At last I make some suggestions on the improvement of this bulge test flat based on my research experience.更多还原