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基于CCD的石英管壁厚检测系统研究

The Research of Quartz Tube Wall Thickness Measuring System Based on CCD

【作者】 包佳祺

【导师】 徐熙平;

【作者基本信息】 长春理工大学 , 光学工程, 2006, 硕士

【摘要】 本文基于CCD器件所具有的自扫描、高分辨率、高灵敏度等特性以及测量精度高、易维护、操作容易等优点,提出了一种用于透明石英管壁厚非接触在线测量的光电检测系统——基于CCD的石英管壁厚检测系统,以满足生产中石英管壁厚检测高效率、自动化、动态检测、非接触测量等要求。 该系统主要由半导体激光光源、准直扩束整形光学系统、主体精密机械系统、单片机控制系统和计算机实时数据处理系统等组成。该系统将光学、机械、电子和计算机技术有机地结合,利用线阵CCD器件接收由石英管壁上下表面所反射的一对一字形激光光束,通过计算两光束间距,从而计算得到石英管壁厚值。该激光光束通过一系列光学系统处理,充分利用了CCD器件的分辨率,达到了高速高精度非接触测量的设计要求。 本论文主要对“基于CCD的石英管壁厚检测系统”研制进行基础理论探讨,在确定该检测系统的总体方案设计的基础上,主要从事了该检测仪的光学系统、CCD硬件电路以及单片机控制系统的研究工作,并对实验结果进行了误差分析,验证了方案的可行性。整机调试和实际测量结果表明,本系统测量精度可达到±0.01mm。

【Abstract】 Based on CCD measuring technology, we present in this paper a quartz tube wall thickness photoelectric comprehensive measuring system, which is applied to measure the thickness of quartz tube wall non-contacted automatically with a line CCD device.The system is composed of a semiconductor laser source, a main fine mechanic system and controller, a real-time controlling system with SCM and data processing system by PC. The line CCD in this instrument can measure the distance between the two laser beams which were reflected from the outside and inside surfaces of the quartz tube wall. The computer processes the data and we finally get the thickness data of the tube wall. This design is a simple and direct way to do the measurement. It takes the advantages of CCD device to carry out the non-contacted measurement with high speed and precision.Based on theoretical research and total design, the designs of optical system, hardware circuit and SCM control system are mainly discussed in this paper. The experiment has proved its practicability. Real measured data indicates that the system can be up to measuring tube wall thickness with precision of 0.01mm.

  • 【分类号】TP274.4
  • 【被引频次】3
  • 【下载频次】453
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