【作者】 薄春卫；

【导师】 端木庆铎；

【作者基本信息】 长春理工大学 ， 微电子学与固体电子学， 2006， 硕士

【摘要】 微球板是一种新型的电子倍增器件，用它作光电板增管的倍增极，具有增益高、无离子反馈、制备工艺简单等优点。 本文在简述微球板光电倍增管的结构、原理及特性的基础上，着重对微球板光电倍增管进行了分析，指出其核心技术是研制出高性能微球板。据此重点研究了微球板的制作工艺，并进行了大量的实验，得出制备微球板的关键技术是玻璃微球的窄粒度分选和高通孔率烧结。分析了影响分选和烧结的主要因素，并给出了有效的解决方法。制备出基本满足要求的微球板电子倍增器的坯体，并对坯体的烧氢还原处理及镀膜工艺作了一定的实验。 文章最后对微球板光电倍增管进行了设计分析，指出微球板光电倍增管不仅具有微通道板光电倍增管的优异特性，而且装架技术简单，成本低，性价比低，是一种很有发展前途前途的极微弱光探测器。更多还原

【Abstract】 Microsphere plate(MSP) is a novel electron multiplier , as dynode of photoultiplier(PMT), MSP has many merits suah as high gain , no ion-feedback and simple fabrication technology,and so on .In this paper,on the basis of discussing the structures,principle and properties of MSP-PMT,we mainly analyse MSP-PMT and point out the key technology of it is to fabricate high performance MSP. So we stess to study the fabricating technology of MSP and do many experiments,point out the key technology for MSP is how to obtain glass beads with narrow range in diameter and how to sinter the glass beads with a sufficient pylome . Factors affect thegradating technology and sintering process along with solution to them is presented. We had fabricated MSP body which can meets the application demands. We also made some experiments on the formations of second electron emission layer and surface electrodes.At last,we carry out design and analysis for MSP-PMT and pointed out MSP-PMT not only has the same excellent performance as MCP-PMT ,but also the fabrication process is simple,the fabrication cost is low and the ratio of performance to cost is high ,so MSP-PMT is a promising dim-light detector.更多还原