【作者】 刘玉圣；

【导师】 范光照；

【作者基本信息】 合肥工业大学 ， 精密仪器及机械， 2006， 硕士

【摘要】 随着微电子产业的发展,对在长行程范围内具有微米级甚至纳米级分辨率的定位系统的要求愈发迫切,工业界中应用较多的是各类激光干涉仪,虽然激光干涉仪具有高精度,高分辨率,测量范围大的优点,但是其价格昂贵且测量精度易受环境的影响。于是开发具有微型化、高分辨率、低成本、易使用等优点的位移传感器,是计量学中一个重要的课题。 本文提出了一种新型的激光衍射光栅干涉仪测量系统,以光栅衍射原理和偏振光学为理论基础,配合正交信号的解相位细分原理,使得该系统可以达到纳米级分辨率。由于光栅干涉仪测量系统以精密光栅栅距作为测量基准,相对于传统干涉仪,光栅尺系统受环境因素所造成的测量误差影响较小。 光学架构上,本光学尺利用偏振光学元件,能大幅改善光栅与光学读数头之间的对位公差;避免了零级衍射光的回馈,提高了光学尺输出的信噪比。 本文也同时开发出一套信号处理流程。经由信号处理电路,可有效补偿因光学元件调整不当或光栅之偏摆所造成的不完美正交信号。 整合本论文创新之光学架构、光学量测原理、信号处理等成果,最后提出一简易流程进行光学读数头之调校与组装,在光学平台上完成微小化线性衍射式光学尺系统的制作。通过与HP5529比对,本光学尺系统在全行程15mm行程范围内,测量结果的标准差优于20nm。更多还原

【Abstract】 As the development of micro-electronics industry, it is exigent of the position system with micrometer-to-nanometer resolution in large stroke. Laser interferometers are most commonly adopted. Though laser interferometer with high accuracy, high resolution and long measurement range, it’s so expensive and the change of the environment should seriously influence the measurement accuracy. Thus, the need to develop compact, high resolution, low cost and easy-to-use displacement sensors is becoming even more indispensable in metrology.A new miniature laser diffraction grating interferometer is developed in this thesis. According to the theory of grating diffraction and polarization optics, associating with the decoding phase theory of quadrature signal, to make the system achieve nanometer resolution. Because of the measurement standard of grating system is the precision grating pitch, compared to usual interferometer, the diffractive grating system reduce the environment influences on measurement accuracy.On the optical frame, the use of polarized optical components can improve the head-to-scale tolerance substantiall,. Furthermore, it can avoid the feedback of the zero-order diffraction beam so as to improve the SNR of the encoder output.A series of signal processing procedure is also developed in this thesis. Errors in quadrature signals caused by misalignment of optical components or the oscillating of the grating can be compensated through the signal processing circuits.After the miniature optical design, measurement principles, signal processing were integrated, the compact laser diffraction encoder system was accomplished through several simple and easy adjustment and fabrication steps in an optical table. Calibration experiment between grating interferometer and HP5529 has implemented, the results show the optical encoder’s standard deviation is less than 20nm in the travel of 15mm.更多还原