ZnO多晶薄膜和纳米粉末的制备及表征

【作者】 张小庆；

【导师】 雷天民；

【作者基本信息】 西安理工大学 ， 材料物理与化学， 2006， 硕士

【摘要】 ZnO薄膜是一种具有优良的压电、光电、气敏、压敏等性质的Ⅱ-Ⅵ化合物半导体材料,在透明电极、表面声波器件、紫外光探测器、压电器件、压敏器件、气敏传感器、光电子器件等方面具有广泛的用途。本文采用了连续离子层吸附与反应法（SILAR）在玻璃衬底上沉积ZnO多晶薄膜,并用X射线衍射仪（XRD）对薄膜样品进行结构分析,用透射电镜（SEM）测试表面形貌,测光致发光（PL）能谱和透射能谱分析光学性能,用四探针测其电导。结果显示:薄膜样品沿着（002）方向择优生长,具有较强的c轴择优取向;薄膜中晶粒排列致密、均匀,颗粒大小约为50纳米左右;薄膜样品中含的杂质比较少,纯度较高。通过PL光谱的分析,说明ZnO薄膜样品的发光光谱主要由三个峰组成,一个是位于2.72eV附近的蓝带,一个是位于3.09eV附近的强的紫带,还有一个是位于3.44eV的弱的紫外峰;透射光谱显示ZnO薄膜样品在λ约为380nm处出现紫外吸收;四探针测量结果表明样品经退火处理后,可能在450oC左右发生再结晶,薄膜的方块电阻随着退火温度的升高而减小。本论文还用直接沉淀法制备了纤锌矿结构的ZnO纳米粉末并分析了不同焙烧温度对ZnO纳米粉末晶粒的影响。检测结果显示粉末样品的颗粒大小为80nm左右。同时通过工艺比较,发现用ZnCl₂和NaOH为原料制备ZnO纳米粉末比用ZnCl₂和Na₂CO₃为原料制备ZnO纳米粉末的颗粒要小、粒度分布窄;用ZnCl₂和Na₂CO₃为原料制备的ZnO纳米粉末的分散较好;ZnCl₂溶液浓度控制在1mol/L左右比较适合ZnO纳米粉末的形成;在500 oC温度下焙烧效果较好。更多还原

【Abstract】 ZnO films areⅡ-Ⅵcompound semiconductor materials with excellent piezoelectricity、photoelectricity、gas、sensitivity properties. ZnO films have many realized and potential applications such as transparent electrodes, surface acoustic wave devices, ultraviolet photodetectors, piezoelectric devices, varistors, gas sensors, photoelectron devices, etc.ZnO films are prepared by successive ionic layer adsorption and reaction method on glass sildes in this paper.The crystallographic structure and the particles of the ZnO films were analyzed with X-ray diffraction（XRD）. The surface morphology and microstructure of the ZnO films were characterized by SEM. The optical properties of the ZnO films was recorded using photolum inescence spectra（PL） and UV-visible transmission spectrum. The electrical resistivity of the ZnO films was measured using four probe instrument. We gained polycrystalline ZnO films that have （002） preferred orientation, uniformity and dense morphology. The technology condition effected microstructure ZnO are analyzed and optimaled. From PL soectra,we find that ZnO films have two peaks,one is bule band on 2.72eV,one is purple band on 3.09eV,another is ultraviolet at 3.44eV. From transmission spectrum,wo find thatλon 380nm is ultraviolet absorbed. And same time, we analyses the effects of annealed temperature of ZnO films properties, will recrystallized on 450oC,the resistance decreases with increasing annealed temperature.we are use direct precipitation method prepare ZnO nanopowders in this paper, The crystallographic structure of the ZnO nanopowders was analyzed with X-ray diffraction（XRD）. The surface morphology and particle size of the ZnO nanopowderss were characterized by SEM. We gained ZnO nanopowders that is a single-crystal hexagonal wurtzite structure, particle diameter about 80nm and disperse well. Meanwhile we analyses the different staples prepared ZnO nanopowders properties,wo find that particle size by ZnCl₂ and NaOH prepared is smallness then by ZnCl₂ and prepared, dispersing by ZnCl₂ and Na₂CO₃ prepared is well then by ZnCl₂ and NaOH prepared. we analyses the effects of different consistency of ZnCl₂ of ZnO nanopowders particle diameter, the optimal technology condition was that the consistency of ZnCl2 is 1.0mol/L. we analyses the effects of different decompounded temperture of ZnO nanopowders particle,the optimal decompounded temperature is 500oC.更多还原