【作者】 吴红超；

【导师】 褚金奎；

【作者基本信息】 大连理工大学 ， 机械电子工程， 2006， 硕士

【摘要】 随着MEMS发展,微能源逐渐成为MEMS应用中的一个非常关键的问题。目前常规能源和现有的微能源在体积、使用寿命、稳定性及对环境的适应能力方面远达不到微系统的需要。基于β辐射伏特效应的同位素微电池所具有的特点,逐渐成为微能源系统研究的一个新方向。为了指导电池的设计和制作,其理论模型的建立是有必要的。 本文用理论分析和数值模拟的方法,探讨了基于β辐射伏特效应的同位素微电池内部作用机制和初始设计参数对电池性能的影响。模型同时考虑了同位素的选取及其衰变能谱的确定、放射粒子能量损失率、半导体特性、载流子的产生与复合、电池的串并联电阻等因素。然后建立一个等效电路,最后分别给出不同初始参数下和不同结构下的模拟结果并与文献作比较、分析与讨论。 本文以同位素⁶³Ni和半导体单晶硅为例进行模拟,模拟结果显示:选择性发射极结构的电池性能优于常规结构的电池性能:扩散层掺杂浓度不应超过10²⁰cm^-3,且在此掺杂浓度下电压达到最大;基区掺杂浓度要尽量小;电池整体性能随温度上升而下降;扩散深度的增加可以引起电池的总体性能上升;放射性物质活度的增加也可以引起电池的总体性能上升;粒子在硅中运动的距离约在40μm。 因为模型的建立涉及到一些公式的简化、数值计算中的舍入误差以及电池实际制作中的一些偶然误差,所以模拟结果与实验数据会有偏差。将模拟结果与引用文章中的结果进行比较,发现在相同初始条件下,模拟数值与实验数值基本吻合。该模型对微电池的开发具有一定的指导意义和实用价值。更多还原

【Abstract】 As the developing of MEMS investigation, micropower becomes a very key problem in MEMS application gradually. Presently, conventional energy and existing micropower, in volume, life-time, stability and the adaptation for environment, can’t far reach the needs of MEMS. In view of the characteristic of radioisotope microbattery based on p-radio-voltaic effect, it gradually becomes a new direction on micro power system. Thus, to guide design and produce of the microbattery, the establishment of theoretical model is necessary.The paper, with the method of theory analysis and value analog, discusses internal operation mechanism of isotope microbattery and the relation between initial design parameters and battery performance. The model accounts simultaneously for isotope selection, transition type of isotope decay, particle energy spectrum, the energy loss rate of emitted particle in the target material, semiconductor characteristic, generation and recombination of carriers, series and shunt resistance, etc. Then a equivalent circuit is established. The model, in different initial parameters and different structures, shows calculation results. Finally, Take calculated result and experiment result to compare, analyze and discuss.This paper takes isotope ⁶³Ni and the single crystal Si as the example to simulate And simulated results show: the selective emitter structure is better than conventional structure in the performance; doped density of diffusion layer had better not surpass 10²⁰cm^-3, and here the voltage achieves in a big way; doped density of the base area, under the situation of satisfing our request, is as small as possible; the battery overall performance drops along with the temperature rise; the diffusion depth is shallower, the battery overall performance is better; The activity increases, and the battery overall performance rises; movement distance of particle in silicon is approximately 40μm.Because some simplified formulas concerned the establishment of model, the error of numerical value calculation and some accidental errors in actual produce, simulated result and experiment data can have the deviation. Under identical initial conditions, compare simulated result and experiment data and discover them coincide basically. The model is considerably instructional and useful for developing microbattery.更多还原