基于MEMS的微驱动器研制及其特性研究

【作者】 孟丽娜；

【导师】 邱成军；

【作者基本信息】 黑龙江大学 ， 微电子学与固体电子学， 2005， 硕士

【摘要】 本课题根据被动阀微泵的工作原理,提出了一种基于MEMS技术具有V型微阀的新型微驱动器,对微驱动器结构中的PZT复合薄板、微阀的制作、特性进行了工艺模拟,设计了相关制作工艺及版图尺寸,并实现了微驱动器。通过理论分析给出方形PZT复合薄板的驱动电压与挠度、复合薄板的厚度与挠度,复合薄板厚度与固有频率的关系,为方形硅杯结构微系统器件的理论与实验的进一步比较分析提供了参考依据。在研制过程中发现V型微阀设计制作的关键因素是硅各向异性腐蚀技术与设计尺寸的关系,并给出了新型V阀微驱动器的流量、背压等测试方法。结果证明采用MEMS技术研制的新型V阀微驱动器的工艺方案可行,工艺简单、成本低、体积小,尤其适用于生物医学领域。更多还原

【Abstract】 According to the principle of micropump with passive valve, this paper provides a new type of microactuator with V-microvalve, which is based on MEMS technology. Carrying out the technical simulation of the making and properties of microvalve, PZT composite thin plates which are the components of microactuator, designing the related fabrication process and scale of mask, then succeeding in operating this microactuator. With the theoretical analysis, it advances the relationship between the applied voltage and displace of square PZT composite thin plates, the relationship between thickness and displace of composite thin plates, also the relationship between thickness and inherent frequency of composite thin plates, Which providing reference for further comparing and analysing the theory and experiment of MEMS devices with square silicon cup. During the process, we find out that the crucial factor of designing and fabricating V-microvalve is the relationship between the technology of anisotropic etching of silicon and the structural measurements. This paper also provides the properties of this new type of microactuator with V-microvalve, such as flux, backward pressure and so on. The microactuator has the advantages of simple technology, low cost, small volume. especially on biomedical field.更多还原