【作者】 李文娟；

【导师】 田兴志；

【作者基本信息】 中国科学院研究生院（长春光学精密机械与物理研究所） ， 机械制造及其自动化， 2005， 硕士

【摘要】 激光调阻机是激光刻蚀技术在电子加工工业中的一种应用,是集光学、精密机械、计算机控制和精密测量技术于一体的高技术的加工设备,主要用于厚薄膜电阻的微调加工。 本文介绍了透镜前双振镜二维扫描方式的激光调阻系统,阐述了激光微调的工作原理及特点;建立了激光调阻机双振镜二维扫描系统的数学模型,推导出扫描场内任意点的坐标与振镜偏转角之间的函数关系式,并分析了用简化关系式代替推导所得的函数关系式控制振镜扫描时所产生的畸变,最后提出了用理论关系式的等效关系式来控制振镜扫描,用等效关系式控制振镜扫描时不仅可以得到高精度,达到了微米量级,而且用等效关系式对振镜进行控制时,还能够实现激光调阻机的高速度要求,从而达到校正的目的。 此外,本文通过建立数学模型分析了激光调阻机光学系统的装配误差,主要包括入射光线与光学系统光轴倾斜和第二振镜与f~θ透镜非正交,并提出了利用两振镜绕转轴偏转一定的角度补偿上述安装误差的补偿方法,这对与激光调阻机今后的性能提高工作具有非常高的应用价值。更多还原

【Abstract】 Abstract: Laser trimming machine is an application of the laser trimming technique in electronic processing industry. It is a high technique equipment that utilizes interdisciplinary technologies such as optics, fine mechanics, computer control and fine measurement. It is mainly applied to the micro-trimming of thick-&thin-film.In this paper, A pre-objective dual-galvanometer-based laser trimming system, and its trimming principle and characteristic are described. With establishing the mathematics model of dual-gavanometer scanning system of laser trimming system, the function relation between the arbitrary point’s coordinate in scanning region and galvanometer’s deflected angle is deduced. Then, the distortions caused by using simple function to control galvanometers instead of the ideal function are analysed. Finally, A method that use the equivalent function to control galvanometers is proposed. In this method, can realize the high accuracy, speed, efficiency.Besides, the mounting errors of the optical system of laser trimming system are analysised by establishing mathematics model. The mounting errors mainly include two sides. One is the inclination of input laser beam and the axis of optic system, the other is the disorthogonality of the second galvanometer and f-theta lens. At last, a method of revovlation galvnometers in a degree is proposed to compensated mounting errors. Mouting error compensation has very hign application to improve the performance of laser trimming system.更多还原