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多自由度微定位工作台压电陶瓷控制方法研究

Research on the Controlling Method of PZT Actuators Used in Multi-dimension Micro Position Platform

【作者】 曹荣

【导师】 秦岚;

【作者基本信息】 重庆大学 , 仪器科学与技术, 2004, 硕士

【摘要】 并联六自由度平台机构具有结构刚度大、承载能力强、位置精度高、响应快等结构优点,在位置精度要求较高的诸如微型机器人、微机械、光纤传感技术、光子学等方面都有广泛的研究和应用。六自由度工作台目前大多采用由Stewart提出的Stewart结构及其变形结构,具有结构紧凑,运动灵活,各运动关节误差不积累,精度高等优点。本文研究了一种新的六自由度微位移平台结构模型,将9个压电陶瓷排列在4层平板之间,组合压电陶瓷的伸缩变形实现平台在X,Y,Z方向上的微平移和微转动。对具有迟滞特性的压电陶瓷的精密控制是平台位姿变化能否实现准确定位的关键。本文主要工作包括以下几个方面的内容:① 在对单个压电陶瓷的控制过程中,采用了Presiach控制模型、通过VisualBasic 6.0和Access数据库连接技术及数值拉格朗日线性及二次插值过程的应用,实现了压电陶瓷的前馈-反馈控制过程。② 通过对PID控制技术的应用,实现了在采用电感传感器进行位置测量的情况下的实时的反馈控制过程,积分分离过程的PID控制进一步提高了系统稳定的能力,缩小了实现系统稳定的调节时间,较先前采用的开环软件补偿方法在系统稳定性、控制精度等各方面都有了较大的提高和改进。③ 在对整个系统进行控制的过程中,在不考虑单个压电陶瓷之间个性差异的前题下,对测量过程得到的整个系统的位姿误差平均分配到各个压电陶瓷并进行进一步的反馈控制及控制电压调整过程,实现了多自由度微定位工作台在5个自由度在测量范围内的精度控制,得到了满意的实验效果。④ 完成了基于PSD空间位置检测器件的分析及相关处理电路的研究,并完成了初步的实验过程。论文通过单个压电陶瓷的实验数据采集、控制模型及PID前馈反馈控制过程结合、数值查询等过程完成了对模型的实验验证。实验数据表明,本文研究的控制方法可以实现对压电陶瓷的精密控制。在对实验平台的控制过程中也获得了较好的控制效果,此外本文还对采用PSD对多自由度微位移平台的位姿测量方法作了基本的探讨和实验检测。

【Abstract】 Parallel 6 DOF platform is now wildly used in the fields of micro robot, micro mechanical, fiber communication, photoelectric, etal for it’s advantages of high stiffness, good ability of taking load, excellent resolution of position, fast response and so on and up to now time, it mainly takes the form of Stewart structure or it’s reforms for it’s merits. In this paper, the author takes eyes on a novel 6 DOF platform model composed of 9 piezoceramics distributed specially between four plates and their deform caused by varying voltage controlled by external voltage source make contribution to the shift and turning round of platform in axis of x, y and z and the precise controlling on piezoceramics charactered as hysteresis is key to the controlling on platform.In the paper the next domains have been proposed:(1) Controlling means. Research on technologies of Preisach controlling model that widely researched and used in the field of PZT controlling, the communication between VB , Access database to fulfill the need of controlling on PZT and further programmed in for controlling process .(2) Feedback control. Analyzing and using the technology of PID on the base of feedback parameter gathered by means of sensor and makes it greatly improved in property of error and time consuming comparing to use of method of Soft Compensation.(3) Error feedback control. On the base of not considering the difference of every PZT, the whole error of system to every PZT referring to the matrix of system for further readjust of the controlling voltage for PZTS has been distributed.(4) Further research. Analyze on the PSD and external processing circuits and concerning experiment and further theoretical analyze for error control.Through the experiments on single PZT’s and experiments on platform as whole concerning the Preisach model and PID controlling and based on the results we made the conclusion that the Preisach model is fit for the control for the PZT used in the system and PID technology can made contribution to the controlling process and makes it improved in the property of control.

  • 【网络出版投稿人】 重庆大学
  • 【网络出版年期】2005年 01期
  • 【分类号】TH703
  • 【被引频次】5
  • 【下载频次】502
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