标准球面透镜组辅助装调的寻优模型及技术研究

【作者】 曹靖；

【导师】 高志山；

【作者基本信息】 南京理工大学 ， 光学工程， 2004， 硕士

【摘要】 标准球面透镜组能产生峰谷值优于λ／20的球面波，是微小光学系统干涉研究项目重要的研究内容之一。标准球面透镜组有取代球面样板的作用，且覆盖球面半径范围广，因此它的研制及装调技术成为光学测试领域急需解决的问题之一。本文主要深入研究系列标准球面透镜组计算机辅助装调技术中的若干问题。 本文在分析标准球面透镜组的装配时若干对光学质量的影响因素基础上，开展了以下六个方面的研究：(1)对标准球面透镜组，不采用几何象差作评价函数，分析与论证Zernike多项式系数项构成寻优模型评价函数的可行性。(2)建立标准球面透镜组的寻优模型，并讨论优化算法。(3)研究Zernike多项式系数与结构失调量之间的函数关系，分析标准球面透镜组计算机辅助装调的可行性；根据系列标准球面透镜组的具体结构特点，在ZEMAX平台上编写自动寻优求解的程序。(4)对标准球面透镜组辅助装调中寻优求解进行软件实例模拟，模拟模型对加工误差、装配失调的效果。(5)建立实验装置，实际研究标准球面透镜组的计算机辅助装调方法，根据球面波的实测结果，求解待调系统的可行的调整量，文中给出相应的理论分析及实验数据和曲线。更多还原

【Abstract】 Reference lens, which can produce spherical wave front whose optical quality is better than ?/20 by peak-valley value in wavelength, is an important part of tiny interferometry system project in measurement and testing. It can be used in wide range of radii so that the development of reference lens is becoming an urgent task to be solved. So a computer-aided alignment method for a series of reference lens is studied in detail in this paper.Based on analyzing the optical quality affecting factors and optical design, the followings are described in detail in this paper: (1) To reference lens, analysising and demonstrating the function of Zernike Polynomial but not aberration; (2) Building the mathematical model for the misalignment reference lens, and discussing the idiographic arithmetic; (3) Based on analyzing the Zernike Polynomial, dissussing the relation of the Zernike Polynimial and the misalignment of reference lens, and choose sensitive structure parameters to optical quality would be determined according to their tolerance data, then programming the alignment software compiled on ZEMAX platforms; (4) Compiled the alignment software to calculating the misalignment value; (5) Experiments are made to examine the computer-aided alignment method and then calculating the function of misalignment value for computer-aided alignment. The theoretical and experimental data and plots are given in the paper.更多还原