近场光学显微镜光纤探针的研制

【作者】 宋林峰；

【导师】 潘石；

【作者基本信息】 大连理工大学 ， 光学， 2004， 硕士

【摘要】 近场光学显微镜的发明(Scanning Near-field Optical Microscope，SNOM或Near-field Scanning Optical Microscope，NSOM)，标志着传统显微镜分辨率衍射极限已被突破，使人类在今后可以用光学方法在小于亚微米的尺度上观察和研究物体的外观形貌和内在性质。 本文围绕着近场光学显微镜的关键部件——光学探针进行论述。介绍了不同光学探针的特性及其制作工艺。其中着重阐述了热拉伸与化学腐蚀相结合制备AF／PSTM(原子力／光子扫描隧道显微镜)双功能弯曲光纤探针的方法，从仪器和实验参数两个方面研究了如何改善光纤探针性能(包括尖端直径、锥角、悬力臂直径等因素)并得到实验验证。将双功能弯曲光纤探针应用于AF／PSTM系统中，可同时获得样品的光学与形貌图像，实现图像分解。更多还原

【Abstract】 SNOM (Scanning Near-field Optical Microscope, or NSOM, Near-field Scanning Optical Microscope) successfully extended the resolution of conventional optical microscope beyond the diffraction limit. It can be used to observe and study sample’s topography and internal characters in submicron scale by optical method.This paper is related to the optical probe, which is the key element of NSOM. All kinds of characters and fabricating methods of different optical probes is introduced. The main point of this paper is about a fabricating method of bi-functional bend optical fiber probe, namely a heated pulling combining chemical etching method. We have improved the method on the equipment and the experiment parameter and got the better probe capability (such as the diameter of apex, the cone angle and the diameter of cantilever). The bi-functional bend optical fiber probe is used in our newly developed AF/PSTM system. The optical images and topographic images are obtained simultaneously and the image separation is realized.更多还原