【作者】 张文；

【导师】 胡生清；

【作者基本信息】 合肥工业大学 ， 精密仪器及机械， 2004， 硕士

【摘要】 本课题是企业为了更好的满足产品的市场需求而委托的研发项目，以研究出一种自动、精确计算压阻式压力传感器补偿电阻大小的方法，以补偿压阻式压力传感器的温度误差。本文基于串并联电阻补偿法的原理，提出了一种基于虚拟仪器的误差补偿方案，推导了在恒流源供电下可以精确的计算出补偿电阻大小和补偿位置的算法，并且在虚拟仪器软件平台LabVIEW上完成了数据采集、处理、显示等软件的设计，经过实验的验证，对传感器的零点温度漂移补偿取得较好的效果，而对灵敏度温度漂移的工艺补偿亦有一定的效果。补偿算法参数测量简单可靠，适于规模化生产，对进一步提高传感器的精度，降低生产成本具有重要的意义。更多还原

【Abstract】 With the development of sensor technology, the market demand is more and more higher. To meet this direction, we were authorized to do this project item. In this project, we want to study a method that can be used to calculate the compensation resistor of piezoresistive sensor accurately. So they can be used to compensate the thermal errors of piezoresistive sensor. In general, a precise resistor is in series with one of the resistors in Wheatstone Bridge to compensate the zero offset, and the other one is in parallel with another arm of the Wheatstone Bridge to compensate thermal zero drift. Based on this principle, in this paper, a compensation method based on Virtual Instrument technology has been put forward. Actuated by current source, a good calculation method of compensation resistors and their position in the Bridge is deduced. The application programs of data acquisition, processing and display have been completed on the development environment of LabVIEW. By the testing, the compensation results of thermal zero drift is good, and those of the thermal sensitivity errors of the sensors are also good by technics compensation. The compensation algorithm this paper proposed is reliable and the parameter can be measured easily, so it can be used in large-scale production. It will be significant to improve the accuracy of piezoresistive pressure sensors and decrease the costs.更多还原