【作者】 李国玉；

【导师】 孙以材；

【作者基本信息】 河北工业大学 ， 微电子学与固体电子学， 2004， 硕士

【摘要】 压阻型扩散硅压力传感器以其低价格得到广泛应用，基于单片机技术的智能压力传感器以其使用方便，测量精确而得以推广。 压力传感器的核心是扩散硅电阻桥，智能压力传感器应用单片机技术采集数据、处理并输出显示结果。扩散硅的压阻系数是温度的函数，所以存在灵敏度温漂，而影响温度的因素是多方面的：测量环境的变化，测量电路产生的热量的影响等等，所以要想得到比较精确的压力值，必须对压力传感器进行校正。 压力传感器的零点存在热漂移、电漂移和时间漂移，减小压力传感器的热零点漂移的措施是各力敏电阻的电阻值及其温度系数的相等性。本论文应用曲线拟合方法，神经网络算法和多项式拟合的规范化方法校正零点，降低成本且精确度提高。 压力传感器的压力灵敏度与压阻系数成比例关系，而压阻系数是温度的函数，所以非线性补偿的实质是消除温度对灵敏度的影响。可应用的方法很多：二极管补偿法，恒流源补偿法，热敏电阻补偿法等。本论文利用集成的温度传感器AD590获得温度信息，应用曲线拟合技术，融入温度信息，得出带有温度信息的压力解析表达式，此方法简化硬件电路且可实现自校正自补偿功能。 本论文根据压力传感器零点补偿与非线性补偿原理，设计出了测量压力传感器的硬件电路及C51软件编程，应用单片机技术测量电路简单，成本低，应用面广，但是由于自身的稳定性其测量结果仍存在误差。更多还原

【Abstract】 Pressure sensors are widely used because of a low price. The intelligent pressure sensor, based on microprocessor technique, are popularized because of convenience and accurate measurement Silicon resistance is the core of pressure sensor, an intelligent pressure sensor acquires, processes data by using microprocessor technique. The piezoresitive coefficient of silicon is a function of temperature and so the offset drift and sensitivity thermal drift occur. The factors affecting on temperature are various: the change of measurement environment, the heat of the measurement circuit and so on. If we want to get accurate pressure values, they must be revised.The sensor offset is governed by its thermal drift, electric drift and time drift, so eliminating the offset thermal drift in the measurement of sensor needs to keep the values of resistance and temperature coefficient for different resistor strips to be equal each other. This paper will discuss how we can revise the offset by curve matching, the algorithm of the neural network and the normalized method of the polynomial match so that the sensor price will fall and its accuracy will be improved.The pressure sensitivity is proportional to the piezoresitive coefficient and the latter is a function of temperature, so after eliminating sensitivity thermal drift, the nonlinearity can be substantially compensated. The methods, diode compensation, constant current compensation, thermal sensitive resistor compensation and so on are widely used. This paper use the integrated temperature sensor to get the temperature sensor and has got an analytical expression with temperature information by curve matching technique, by this means, we can not only predigest hardware circuit but also realize the function of self-revision and self-compensation.In addition, based sensor thermal drift and nonlinearity principle, this paper has designed intelligent sensor hardware circuit and edited a C51 program. The circuit with micro-process is simple and cheap, though the result has still a little error.更多还原