【作者】 陈阳；

【导师】 王慕坤；

【作者基本信息】 哈尔滨理工大学 ， 测试计量技术及仪器， 2003， 硕士

【摘要】 在计算机控制下，光、机、电相结合的微厚测量仪，不仅能实现高精度、高效率的非接触测量，不破坏被测物体表面，而且易于实现动态采样、实时处理、在线测量等自动化要求，因而在现代化的工业测量中将具有广泛的应用和前景。光学式非接触厚度-微位移测量仪是在激光三角测量法的基础上实现的，在本研究方案中，根据象点在PSD上的移动量建立与被测物厚度-微位移变化之间的数学模型，通过对象点位置变化的计算，实现被测物厚度-微位移变化量的测量。 本文重点阐述了光学式非接触厚度-微位移测量仪的工作原理，并对测量仪的工作过程进行了分析；对影响测量精度的因素做了讨论。同时对仪器的软、硬件进行了设计，制成了一台原理样机。应用该测量仪对厚度-微位移测量进行了多项实测，对测试数据作了分析和讨论，取得了比较满意的结果，达到了设计要求。 该测量仪的分辨力小于0.2m，量程1000m。更多还原

【Abstract】 Optical & noncontact thickness-displacement meter is a high-tech measuring instrument. It is a synthesis combined with optical, mechanical and electrical knowledge. Under the control of computer this meter not only can realize many noncontact measurements in high definition and efficiency without destroying object surface, but also can be easy to fulfill some automatic demands like dynamic sampling, real time processing, on-line measuring. So it will be well used in the modern industry measurement and has a wide prospect in the future.The meter is based on the triangular measuring principle of laser. In this research scheme, semiconductor laser is used as the light resources, PSD(Position Sensitive Detector)as the sensor, and computer as a system of high speed sampling & processing data. The main idea of this research can be summed up as following words, reflecting light or scattering light upon the surface of measured object formats an image on the photo surface of PSD by a optical system, because of the good relationship between the offset of image point in PSD and the offset of object thickness, a mathematical model can be founded according to this relationship .It can measure the shift of object thickness through these analyses of movement of image point position in PSD, and this device can be tested its reliability with many practical specimens.This article formulized emphasis on the measuring principle of meter, analyzed the work process of the meter, discussed the factor that affected the measuring definition, designed software & hardware of the apparatus and fashioned a prototype model. In practical measuring, we drew a satisfied conclusion, and reached the designed requirements.The resolving power of this meter is 0.2 micron and range of measurement is 1000 micron.更多还原