MEMS的集成设计平台建模及其系统级设计技术

【作者】 霍鹏飞；

【导师】 苑伟政；

【作者基本信息】 西北工业大学 ， 机械制造及其自动化， 2002， 硕士

【摘要】 随着MEMS向着产业化的方向发展，建立MEMS集成设计平台是实现MEMS系统、科学、规范化设计的有效手段，对于减少MEMS设计和制造过程的重复和浪费、缩短产品研发周期和提高设计与生产质量方面具有重要的意义。平台的建模和系统级设计是MEMS集成设计平台的重要组成部分，也是当前国际上MEMS研究的前沿和热点，具有重要的理论研究意义和应用价值。 本文首先以面向对象方法为指导，使用统一建模语言(UML)对基于“top-down”设计和“bottom-up”修正的MEMS集成设计平台进行了建模研究。建立了基于分布对象技术CORBA规范的MEMS集成设计平台的框架结构，采用标准数据交换格式IGES实现不同工具软件数据交换，通过“映射法”把持久对象转换为关系表格用关系数据库保存持久对象。 同时，针对MEMS的系统级模型是一个混合信号模型，具有多能量域耦合、多信号混合、离散事件子系统与连续时间子系统交互的特点，使用VHDL-AMS作为混合信号模型建模的工具，采用多端口组件网络建模方法建立了MEMS系统级模型，把微型机电系统分解为多个子系统或组件，各子系统被定义为多端口组件，子系统的内部行为通过其端口行为来描述，子系统间的能量与信号的交换通过组件的端口映射来实现，从而实现了对连续时间系统和离散事件系统的建模与仿真，满足了非线性系统以及大信号分析要求。 为了便于在不显著影响精度而能快速地仿真与分析MEMS整个系统动态行为，通过器件或组件的降阶模型(或称为宏模型)方法描述了多端口组件的端口行为，并采用有限元模型理论在三维空间内建立了微机械器件或组件宏模型，为系统级设计所需要的组件库的建立提供了理论基础和技术支持。 此外，还研究了使用能量法从三维实体自动获取宏模型的理论与方法，以用于MEMS系统级设计的反向验证。 在此基础上，使用宏模型方法对硅基微陀螺进行了系统级设计与行为仿真，为MEMS的器件级设计等提供了重要的设计依据。更多还原

【Abstract】 With the development of MEMS towards industrialization, it is an effective means to established the integrated design platform in order to design MEMS systematically, scientifically and standardizedly, which is important to reduce the iteration and waste in the manufacturing of MEMS, shorten development cycle of products and improve the design and manufacturing quality of MEMS. The modeling of the design platform and the system-level design of MEMS are important parts of the MEMS integrated design platform and the highlight in front edge of the international MEMS research, with important theoretical significance and applied value.At first of this thesis, the MEMS integrated design platform based on a top-down design and bottom-up verification approach was modeled by UML in the object-oriented method. The architecture of the platform was established based on the Distributed Object Computing with CORBA specifications. The Initial Graphics Exchange Specification (IGES) was introduced to interchange the information between different CAD tools. The persistent objects were saved in relational database by mapping persistent objects to relational tables.Secondly, a network based on multi-terminal components modeling methodology was applied to model MEMS at system-level by the analogy and mixed-signal modeling tool of VHDL-AMS, for the system-level model of MEMS is a mixed signal model, which has attributes of multi-energy domains coupling, multi-signals mixed and interacting between discrete-event subsystems and continuous-time subsystems. With this method, the whole system can be divided into some subsystems defined as multi-terminal components; the behavior of the subsystems depends only on their terminal signals; the information exchange between subsystems was done by the signals at their terminals. The continuous-time systems or discrete-event systems can be modeled and simulated with this method, which satisfied the requirements of nonlinear systems and large signals analysis.In order to simulating rapidly and analyzing the dynamic behavior of the whole MEMS but not reducing accuracy significantly, the terminal behavior of multi-terminal components was modeled as reduced-order model (or called macromodel). Upon the finite element model theory micro-mechanical devices or components were modeled in the spatial, which afforded theoretic foundation and technicalsupport to MEMS system-level design.In addition, the theory and methodology of automatically generating analytical macromodels of microstructures from 3D solids was researched, which can be used to design MEMS in a bottom-up verification path at system-level.With those understandings, a vibratory-rate micro-gyroscope was modeled and simulated at system-level with the macromodeling approach, which offered the references to the MEMS device-level design.更多还原