MEMS高g值加速度计设计技术研究

【作者】 李仁锋；

【导师】 程永生； 文贵印；

【作者基本信息】 中国工程物理研究院北京研究生部 ， 物理电子学， 2003， 硕士

【摘要】 本论文简要地介绍了钻地武器的国内外发展现状及其在国防建设中的重要作用，同时阐述了自适应引信的优点和发展趋势。 论文以钻地武器为背景，采用MEMS工艺技术设计一种耐50000g以上的、量程在1000～50000g基于MEMS工艺的高g值加速度计。本文运用有限元软件ANSYS对该加速度计的结构进行了应力分析和模态分析，仿真验证了在50000g的冲击环境下加速度计的应力、最大位移、模态响应，确保该加速度计在大冲击环境下安全可靠并能准确工作。除了采用有限元分析外，还采用矩阵方法对该结构各方面进行了分析，此方法对优化工程设计十分有用。更多还原

【Abstract】 The development status quo of EPW (earth penetrating weapon) and the importance in the national defence construction is introduced briefly. The advantage and development trend of self-adapting fuze are also mentioned.Under the background of EPW, a high-g accelerometer with MEMS technique, which can measure from 1000g to 50000g and stand over 50000g impact, is designed. With the finite element analysis (FEA) software ANSYS, we have performed the stress analysis and mode analysis of the accelerometer structure, confirming stress force, max displacement, mode response of the accelerometer in the 50000g impacting environment, and ensuring the accelerometer to be secure, responsible and to work precisely.Besides the FEA method, the accelerometer has been analyzed entirely with the matrix method, which is useful to optimize the engineering design.更多还原