【作者】 冯晓国；

【导师】 张立平；

【作者基本信息】 中国科学院研究生院（长春光学精密机械与物理研究所） ， 光学工程， 2003， 硕士

【摘要】 激光直写是衍射光学元件的一种先进制作技术，激光直写设备是采用激光直写技术制作衍射光学元件并开展其研究的物质基础。本文基于中科院长春光机所研制的四轴激光直写设备开展了对其Y轴传动系统的分析研究，可以为相关高精度传动系统的设计和检测提供重要的依据。 本文以二元光学激光直写设备Y轴功能要求和设计指标为基础，提出了该传动系统的总体结构设计方案，并与其它高精度传动方案进行了比较。该传动系统设计方案可以满足长行程、定位精度为亚微米级精度的传动指标要求。同时，对传动系统各个传动环节也提出了具体的结构设计方案，解释了滚珠丝杠副、空气静压导轨、丝杠导轨连接等多个传动环节结构设计的具体思路。对于开展类似结构设计工作，有实际借鉴意义。 对于所提出的传动系统的具体结构，本文也简单地进行了结构性能指标分析。对于该传动系统的最小位移灵敏度、定位精度的影响因素、系统刚度及固有频率都进行了细致的计算，肯定了所提出的结构设计方案。 精度检测环节对于评价设计的优劣是至关重要的，本文也对该传动系统的精度检测过程作了详尽的陈述。介绍了HP5528A双频激光干涉仪、高精度电感测微仪、标准平晶等检测工作中使用的主要检测仪器。重点阐述了传动系统位移灵敏度、导轨直线度、传动系统定位精度的检测过程和检测结果。并简单地评价了检测结果。更多还原

【Abstract】 Laser Direct Writing (LDW) is an advanced fabrication technique for diffractive optical elements (DOEs). LDW equipment adopting laser direct writing technique is substance foundation for researching and manufacturing DOEs. Basing on the Four-axis LDW equipment manufactured by Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Science, the paper analyses Y-axis transmission system of this equipment systematically, it can provide some consult for designing and detecting high-precision transmission system.Basing on Y-axis’ function request and design indexes of binary optical element’s laser direct writing equipment, and simply contrasting with other projects of high-precision transmission system design, the paper puts forward the project of total structure design of the transmission system. This project meets the transmission index of long stroke and high positioning accuracy, the positioning accuracy is sub-micron degree. At the same time, the paper puts forward the design projects of each part of the transmission system, explains design thoughts of several parts, such as the ballscrew, aerostatic guide, connection of ballscrew and aerostatic guide. So the paper will be a good reference for developing similar task.For the transmission system structure, the paper analyzes structure performance figure simply. For the transmission system’s the least displacement sensitivity, affection factors of positioning accuracy, system toughness and natural frequency, the paper calculates them carefully. Through a great deal of work as above, we affirm that the project of total structure design is feasible.Because precision detecting is very important, it can judge whether the design is good or not, the paper describes the detecting process detailedly. Several main detecting instruments which are used in the detecting work are introduced, such as HP5528A dynamic calibration, high-precision inductance scale micrometer and the cubical glass which has been demarcated. For the displacement sensitivity and positioning accuracy of transmission system, guide linearity, the detecting process and detecting result are expatiated. The detecting results are evaluated simply.更多还原