钛基钠米金刚石涂层场发射阴极工艺研究

【作者】 翟春雪；

【导师】 张志勇；

【作者基本信息】 西北大学 ， 电路与系统， 2003， 硕士

【摘要】 目前市场上对平板显示器的需求日益增多，而在各类平板显示器中，场致发射平板显示器兼有阴极射线管显示器和液晶显示器的优点，具有极大的发展潜力。 本文介绍了一种器件结构和制备工艺简单，易于实现大屏幕显示，且适于批量生产的新型场发射阴极，即在金属钛衬底上均匀涂覆纳米金刚石涂层，然后在高温下退火处理实现两者的牢固键合，并形成欧姆接触。 从理论上研究了制备金属基金刚石纳米涂层场发射阴极的可能性，并根据相关理论，提出一整套工艺设想。 重点探索了涂覆金刚石纳米涂层的方法、实现金刚石与金属钛的热粘接工艺以及氢等离子体处理的工艺参数，筛选出了在本实验系统中的最佳方法和工艺条件。 采用XRD、SEM、TEM、LRM和EDS等测试分析手段，对实验样品进行检测分析。分析结果表明，热处理后，样品表面确实生成了TiC，实现了金刚石纳米涂层与金属Ti的键合。自行设计组建了场发射性能测试系统，并用其测试了样品的场发射性能，表明实现热粘接后样品具有较好的场发射性能。更多还原

【Abstract】 With both CRT’s and LCD’s virtue, FED has a bright future in all kinds of PDF.In this thesis, a new type of field emission cathode was described, that is using simple technique to deposit commercial nano-diamond powder on Ti substrates, bonding diamond and Ti, and form Ohmic-contact by proper high temperature to form cathodes. This methods is adapt to large area and batch production.Feasibility of preparation of this kind of cathode was investigated theoretically, and a series of technique was proposed.The method of preparing the uniform coating, the techniques of thermal bonding and hydrogen plasma treatment was investigated experimentally. The optimum coating method and technological parameters was summarized.The cathode sample was characterized by XRD, TEM, SEM, LRM and EDS methods. The result indicated that the surface of sample contain TiC, which verifying bonding was formed between diamond coating and Ti substrate. The field emitting property of samples were measured with testing system designed and constructed by ourselves. Cathode prepared by experiment indicated preferable field emission property.更多还原