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基于CCD的高精度线径测量系统研究

Research on the High Accuracy Linear Diameter Measurement System Based on CCD

【作者】 苏波

【导师】 王云才;

【作者基本信息】 太原理工大学 , 控制理论与控制工程, 2003, 硕士

【摘要】 本文介绍了CCD在非接触测量中的应用,阐明了线阵CCD非接触测量系统的组成及需要解决的问题。 本文建立了基于线阵CCD的线径高精度测量系统,在对照明系统改进的基础上,采用曲线拟合求拐点的方法来提取信号的边缘特征,最后根据透镜的放大倍率β得到低于CCD像素尺寸直径。 论文中分析了仪器的误差,并画出了误差校正曲线,以达到提高了测量精度的目的。最后用另一种衍射的方法对相同的物体进行了测量,比较后得出了两种方法的优劣。 本测量系统的测量范围为0.5~9.5mm,总的不确定度为±7.04μm。

【Abstract】 This paper introduces the application of linear CCD in non-contact measurement, clarifies the structure of non-contact measuring system and problem needed to resolve.In the experiment of this thesis, a high accurate measurement system based on linear array CCD is made up; the illumination system is improved, and curve fit is adored to obtain the margin value. Finally, the size of the obtained object is less than the pixel dimension according to lens magnification p.In the thesis, the error analysis of the instruments and error correction curve is presented, so the measurement accuracy is relatively high. In addition the same parameter is measured by using diffraction theory. At last, the two measurement means are compared with each other and the evaluation for both means is given.Experimental results show that total uncertainty is about ±7.04um within 0.5~9.5mm.

  • 【分类号】TP274.4
  • 【被引频次】23
  • 【下载频次】1019
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