【作者】 王国华；

【导师】 王小曼；

【作者基本信息】 长春理工大学 ， 测试计量技术及仪器， 2002， 硕士

【摘要】 本文论述了精密工作台电控系统的结构及工作原理，它主要应用于准分子激光光刻技术中。光栅位移检测系统和闭环伺服控制系统，是由微机来控制的，它们可以通讯，以交换数据或是传递控制信息，实现高精度的定位．各部分又可以独立运作，以完成自己的特定功能。文中讨论了应用CPLD器件来简化电路的设计。微机和下位机的通讯采用RS232串行接口，适用于远距离通讯。其电路设计简单而且功耗低。上位机系统软件采用LABVIEW图形化编程环境，通过交互式图形化前面板来控制系统，并显示结果。更多还原

【Abstract】 The structure and basic theory of the electrical control system of the precision workbench. It is applied in quasi-molecular laser photolithographic technology. Optical grating bit shift detection control system, and digital closed-loop servosystem, which controlled by the computer, can communicate mutually, exchange data and transmit control information. Overall system can achieve the high accuracy position. Each part also can run and implement discrete work. The communication of the master computer and subordinative computer adopts RS232 serial interface, which adapt the long distance communication. It is designed dimply and low power dissipation. The paper discusses the application of CPLD components to predigest the circuit design. The master computer system software is programmed by LabVIEW which has graphic programming environment, and controls system through the interactive graphic front panel and displays the result.更多还原