【作者】 陈光炎；

【导师】 温志渝；

【作者基本信息】 重庆大学 ， 仪器科学与技术， 2002， 硕士

【摘要】 加速度传感器是一种十分重要的力学量传感器，是惯性测量组合（IMU）系统的基础元件之一。随着现代科学技术的发展，汽车、工业自动化、宇航、导弹等领域对加速度传感器提出了微型化、高性能等要求。现代科学技术的发展（主要是MEMS技术）为加速度传感器的微型化提供了技术基础。探索研究新原理、新结构、新功能的高性能微型加速度传感器已成为世界各国的研究热点。本文作者纵观了硅微加速度传感器和真空微电子学的国内外研究现状，提出利用真空微电子技术、MEMS技术和传感器技术，依据冷阴极场致发射的原理，研究一种新型的集成真空微电子加速度传感器。该传感器集固体器件和真空电子器件的优点于一身:具有抗辐射、温度稳定性好、快响应、高灵敏、高分辨率、低电压、低功耗、信号处理电路简单、体积很小等优点。本论文围绕真空微电子加速度传感器的相关基础理论和关键制造技术进行了较系统深入的研究，重点研究了集成真空微电子加速度传感器的结构、工作原理、力学、电学特性等。利用有限元分析软件ANSYS对微型结构进行了计算机模拟，通过静力学分析、模态分析和谐响应分析，得出了微加速度传感器结构尺寸对其位移量、谐振频率及模态振型的影响规律。在此基础上进行了结构优化设计和工艺设计，研究了锥尖成形工艺和“多掩膜－无掩膜”腐蚀工艺，根据工艺流程绘制出光刻掩膜版图，为该传感器的研制奠定了一定的基础。更多还原

【Abstract】 The acceleration sensor is the key basic component for IMU (Inertial Measurement Unit) to sense and analysis the motion information. With the development of IMU, there is a growing demand for acceleration sensor with excellent temperature stability, resistant to radiation, quick response, low power and small size. As a result of development, many types of acceleration sensors appeared, such as piezoresistive type, capacitive type, piezoelectric type and tunnel type, etc. Vacuum microelectronics is an emerging and evolving technology. The vacuum microelectronic devices, appeared in the early 90s, arouse the attention all over the world for the advantages of excellent temperature stability, low power consumption, resistant to radiation, quick response. Characterized by field emission in vacuum micro chambers, it has found applications in the display field, and more recently in sensor technology. Based on the basic principles of vacuum microelectronics, a new kind of integrated vacuum microelectronic acceleration sensor is presented. The acceleration sensor has been developed using MEMS technique, microelectronic technique, and vacuum electronic technique. It can be widely used in navigation and aerospace, industry automation and car airbag control and so on. The research of such kind of acceleration sensor is of great scientific significance.In this paper we seek to report on a novel method of utilizing field emission in acceleration sensor. Emission currents are directly related to, among other parameters, the distance separating the emission cathode and anode. When either or both electrodes are micromachined in a cantilever beam capable of deflection under the influence of an external force, the emission current detected will be a direct measure of force magnitude. In order to calculate the deflection parameters of cantilever beam, a full static, mode and harmonic finite element analysis (FEA) using the ANSYS Finite-Element program is performed. The results derived from FEA are well analyzed for the discipline of structure and its displacement, resonant frequency and mode. On the base of these analyses, optimization design and arts design are performed and the layouts of masks are plotted. The theory model of this kind of acceleration sensor is founded to guide the fabrication.更多还原