适用于VCSEL/SNOM复合探针的VCSEL特性研究

【作者】 白利伟；

【导师】 胡礼中；

【作者基本信息】 大连理工大学 ， 微电子学与固体电子学， 2002， 硕士

【摘要】 近场光学显微镜（SNOM）作为一种用于观察和研究亚波长物体的外观形貌和内在性质新的重要光学仪器，于近几年来，在纳米和介观尺度上，为物理、化学、生物、医学、地质和信息产业等的研究和生产提供了许多新的知识，也极大地推动了近场光学的发展。传统的近场光学显微镜的相对较低的输出信号是阻碍其更广泛应用的一个难题。这个问题可以用垂直腔表面发射激光器（VCSEL）作为SNOM的反馈部分来解决。 在VCSEL的制备方面，国内也已经有着很成熟的经验，已经成功的制造出了多种类型的器件；我们半导体教研室利用现有的液相外延生长设备采用自组织生长的方法成功制备出外观形貌规整的μm量级尺寸的AlGaAs的类探针点。国际上，已经有先例将SiO₂探尖与VCSEL采用简单、有效的胶合方法结合，制成VCSEL／SNOM复合探测器。 本论文主要是对现有的VCSEL管芯进行封装，并利用实验手段对其特性进行检测，由金相显微镜图像可知，VCSEL的出光窗口直径仅为40μm左右，且垂直于有源区结平面表面；由I-V曲线可知，其开启电压为1.4V；由P-I曲线可知，其阈值电流为2.8mA；由远场特性曲线可知，VCSEL的远场特性显然具有圆对称特点，在平行、垂直方向上远场特性曲线的半高宽度大概在5°、8°左右，具有较小的发散角；由光谱特性可知，VCSEL的激射波长为843.8nm附近，其半高宽度为2nm，且随着工作电流的增加有红移的趋势。通过对VCSEL特性的检测，并与其它的半导体激光器进行比较、分析，可以得知VCSEL的特性优点。这些主要都是为了打好将VCSEL与AlGaAs探尖胶合起来，构成VCSEL／SNOM复合探针做些在VCSEL特性方面的基础研究。更多还原

【Abstract】 Scanning near-field optical microscope (SNOM), as a kind of new important optical apparatus that is used to observe appearance or investigate immanent essence of sub-wavelength objects , has been played a crucial role in the wide range of physics , chemistry, biology, medical science, geology, IT estate in last years . One of difficulties of conventional SNOMs is the relatively low power of out signal . This problem is solved by using vertical cavity surface emitting laser (VCSEL) feedback as the SNOM detection principle .Many kinds of VCSELs has been fabricated in the domestic and an kind of AlGaAs microtip with micrometer dimension has been successfully grown on GaAs substrate with self-organization by liquid phase epitaxy (LPE) . It was reported that a VCSEL and a Si microtip can be simply aligned together using an adhesive agent .hi this article , the peculiarity of VCSEL has been observed and investigated . According to photomicrograph, the diameter of emitting aperture is about 40um . In term of I-V curve, the threshold voltage is 1.4V . Considering P-I curve , the threshold current is 2.8mA . According to far-field curves, VCSEL has the circle symmetry, the full wideth at half maximum (FWHM) is respectively 5 and 8 in two different direction . In the term of spectrum curves, the stimulating wavelength is 843.8nm and FWHM is about 2nm . All is the base work in the aspect of VCSEL that a VCSEL and a AlGaAs microtip can be integrated and established as a VCSEL/SNOM sensors .更多还原