【作者】 辛国锋；

【导师】 陈国鹰； 赵红东；

【作者基本信息】 河北工业大学 ， 微电子学与固体电子学， 2002， 硕士

【摘要】 半导体垂直腔面发射量子阱激光器是当前光电子学领域最活跃的研究课题之一。它与边发射激光器相比具有更优越的特性，例如，具有极低的阈值、较小的远场发散角、调制频率高、易实现单纵模工作、易实现二维集成等，所以，它被广泛地用于光纤通讯、光信息处理、激光打印、光传感等领域。 本文建立了一个直接耦合的准三维模型，通过该模型对垂直腔面发射量子阱激光器的等势线分布、注入有源区的电流密度分布、有源区中的载流子浓度分布、光场强度分布等特性进行分析，对激光器的这些相互关联的特性进行数值计算，并研究了这些特性之间的相互影响。 具体工作可以概括如下：从求解泊松方程、载流子扩散方程和光场方程的自洽解入手，首先，计算出激光器中的等势线分布，从而得到注入有源区的电流密度分布、有源区中载流子浓度分布。其次，研究了N型DBR层、高阻区的不同位置和不同厚度、限制层和出射窗口半径的大小及比值的不同对电流密度分布和载流子浓度分布的影响，并给出了双氧化限制层激光器中的等势线分布。最后，实现了光电耦合，并给出了阈值附近光场分布。计算结果表明，我们的理论计算结果与文献所给出的及实际情况相符。更多还原

【Abstract】 Currently quantum well VCSEL (Vertical Cavity Surface Emitting Laser) is one of the most active research problems in the field of optoelectronics. It has more advantages than edge-emitting laser, for example, it has very lower threshold current, smaller far-field divergent angle, higher modulating frequency, and it’s easy to realize single longitudinal mode operation and 2-dimension integration etc. So it is widely used in the fields such as fiber communication, light-information processing, lasers print and light-sensor etc.In this paper, we give a direct coupling, quasi-3-dimesion model. Using this model, we analyzed the distributions of the equipotential lines, current density, carriers concentration and optical fields in the quantum well VCSEL. We also analyzed the correlative characteristics and their influences with each other.The specificwork can be summed up as following: we found the self-consistent solution of the equation of Poisson, carriers diffusion and optical field. We first calculated the equipotential lines distributions, then found the distributions of the injected current density, carriers concentration in the active region. Second we studied the influences of N-DBR, different position and thickness of the oxidized region, different radius and ratio of the emitting window, and gave the distributions of equipotential lines in the laser with double oxidized regions. Finally, we realized photoelectricity coupling and gave the optical distribution near the threshold. The results show that the theoretical calculations well match the experimental results.更多还原