【作者】 刘虹；

【导师】 徐敏； 陆耀东；

【作者基本信息】 北京工业大学 ， 光学， 2001， 硕士

【摘要】 本文对哈特曼—夏克（Hartmann-Shack）波前传感器在激光束波前和光束质量检测中的应用进行了研究。给出了波前拟合的算法和光强拟合的算法，并进行了精度分析。 借鉴哈特曼—夏克（Hartmann-Shack）波前传感器在自适应光学中的应用，用标准平面波作为检测的基准，对波前进行相对测量，在一定程度上消除了由于光学元件加工误差、背景噪声等系统误差和随机误差的影响，进一步提高了检测精度和自动化处理程度。 测量波前斜率时，用亚象素法来提高待测光波通过子孔径阵列后在CCD靶面形成的光斑质心的定位精度。重构波前时，采用模式法中的泽尼克多项式拟合波前，从而能够了解波前的象差类型，其拟合精度也较高。拟合光强分布时，采用双三次B样条曲面拟合的方法，曲面片间二阶连续，拟合出的光强分布曲面光滑自然。 本课题用哈特曼—夏克（Hartmann-Shack）波前传感器实现了激光波前检测，同时得到了光强分布等其它激光光束质量参数，为同时检测激光波前和光束质量提供了一种高精度，高灵敏度而且简单可行的方法。更多还原

【Abstract】 The application of Hartmann-Shack wavefront sensor in testing of laser wavefront and laser beam quality is presented in the theses. The algorithms of fitting wavefront and laser power distribution are provided and the accuracy is theoretically analyzed. The application of Hartmann-Shack wavefront sensor in Adaptive Optics is used for reference. By selecting a normative plane wave as a benchmark for relative test, the influence of system error and random error such as machining error of optical components, background noise is in some extent eliminated, therefore the accuracy and the degree of automatic processing can be promoted. In the measurement of wavefront slope, a sub-pixel method is used to increase the accuracy of locating the light spot mass centers which are formed at a CCD sensing surface when a testing light wave passes through the Hartmann-Shack sensor. In the wavefront reconstruction, a modal wavefront estimation method (i.e. wavefront fitting with Zernike polynomials) is used, therefore the aberration types of wavefront can be well understood and the high accuracy can be obtained. In fitting the laser power distribution, Double Cubic B Spline Function is used for surface fitting of the distribution. The surface patches are naturally linked and the whole distribution surface is smooth. Laser wavefront testing is successfully performed by using Hartmann-Shack wavefront sensor and laser beam quality parameters are obtained at the same time. A simple and feasible method of wavefront and laser beam quality test with high accuracy, high sensitivity is provided.更多还原