微机械加工电容式压力传感器及信号处理技术研究

【作者】 庞济；

【导师】 牛德芳；

【作者基本信息】 大连理工大学 ， 信号与信息处理， 2000， 硕士

【摘要】 电容式传感器具有结构简单、灵敏度高，动态特性好、对辐射和强烈振动等恶劣条件适应性强、价格便宜等一系列优点。但是，电容式传感器生产时电容引线困难、输出信号受干扰和温度影响较大、输出特性存在非线性等问题制约了电容式传感器的生产及应用。 本课题中研制了一种新型微机械加工传感器，解决了引线封装问题；设计了一种信号调理电路，解决了微小电容变化量的精密检测和信号放大问题；同时用单片机实现了输出信号的温度和非线性的软件补偿。更多还原

【Abstract】 Capacitor sensor has a lot of advantages of simple structure, high sensitivity, excellent dynamic characteristic and strong resistance to high temperature, radiation and violent vibration, but with low-price. While there are also some disadvantages such as down-lead inconvenience, output signal disturbance, temperature drift and nonlinear influence, which limit it application. This thesis develops a new type of capacitor sensor with micro- mechanical process to simplify the down-lead encapsulation. It not only designs a signal conditioning circuit to measure and amplify the tiny variation of capacitance, but also accomplishes the temperature and non-linear compensation by software.更多还原