【作者】 李博；

【导师】 陈琦； 周望；

【作者基本信息】 苏州大学 ， 光学工程， 2013， 硕士

【摘要】 光栅刻划机历来在精密机械领域内称之为“精密机械之王”，自第一台光栅刻划机问世后在相当长的历史时期内，光栅刻划机的系统结构与技术进步始终标志着精密机械技术领域的发展与进步。为达到高精度定位和高精度的分辨力，并考虑国内现有的加工和检测技术，驱动方式选为摩擦驱动。摩擦驱动机构是由驱动轴和从动杆间的压紧力所产生的摩擦力使从动杆产生运动，连续的展成从动杆的直线运动，从而实现运动和动力的传递。传统的丝杠螺母机构、齿轮齿条机构与摩擦传动相比，有很多不足之处，主要是在当前技术条件下，运动精度无法达到要求，如丝杠螺距误差、齿轮的齿距误差等都是影响传动精度的重要因素。此外，传动中的间隙、摩擦发热等也是造成传动误差不可忽视的因素。摩擦传动则可以克服上述传动中的不足，因其元件形状简单，易于保证加工精度，传动无间隙，因而能降低电机及测速机的频率波动。所以在超精密机床中采用摩擦传动，能较好地实现高精度传动[38]。但摩擦驱动自身的驱动方式也有不足之处，在运动过程中会出现爬行和打滑的现象，而打滑现象通过相应的增加预压力即可消除其影响，所谓爬行即在摩擦副中从动件在匀速驱动和一定摩擦条件下产生的周期性时停时走或时慢时快的运动现象。本文针对爬行现象从理论上通过应用matlab中的simulink部分进行理论的分析，通过对摩擦驱动机构的实验数据整理讨论摩擦驱动的爬行对实际的定位精度的影响大小。通过实验的整理证明，摩擦驱动在预压力100N的工作过程中爬行现象并不能对其定位精度产生影响。更多还原

【Abstract】 Grating ruling machines have always been in the field of precision machinery iscalled "the king of precision machinery, since the first grating ruling machines available inquite long period in history, grating ruling machines system structure and technicalprogress always marks the development and progress in the field of precision machinerytechnology. To achieve high precision positioning and high resolution, and considering thedomestic existing processing and detection technology, drive way elected friction drive.Friction drive mechanism is made up of the drive shaft and the driven compactionforce generated by the friction between the rod in the follower lever to produce movement,continuous exhibition into the linear motion of the follower lever, thus realizing movementand power transmission. Traditional screw nut mechanism, gear rack mechanism comparedwith friction drive, there are a lot of shortcomings, mainly in the current technicalconditions, the motion precision can’t meet the requirements, such as the screw pitch error,pitch error of gear and so on are the important factors affecting the transmission accuracy.In addition, the transmission of the clearance and friction heat is caused by transmissionerror factors cannot be ignored. Friction drive can overcome the above shortcomings, inthe transmission because of its simple element shape, easy to guarantee machiningaccuracy, the transmission zero clearance, thus can reduce the frequency fluctuation ofmotor and speed measuring machine. So in the ultra precision machine tool using frictiondrive, can achieve high precision transmission.But the friction drive drive mode has the defects of his own, will appear in the processof movement crawl and skid phenomenon, and skid phenomenon through thecorresponding increase of preloading can eliminate the influence, So-called crawling thefollower in friction pair under the condition of uniform friction drive and must be producedby the periodically when the continual walk or slow fast movement phenomenon.crawlingphenomenon in theory, the author of this paper by using matlab simulink part of theory analysis, through the discussion of experimental data of friction drive mechanism offriction drive creep influence on positioning precision of the actual size.Through experiments prove, friction drive in the process of the work of100Npre-pressure crawling phenomenon does not affect the positioning accuracy.更多还原