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非连续平面的平面形状误差测量技术
Technique of Discontinuous Surface form Error Measurement
【作者】 陈东岳；
【导师】 熊木地；
【作者基本信息】 大连海事大学 ， 电子科学与技术， 2012， 硕士
【摘要】 精密测量是工业精密加工的重要环节之一,一个工件在精加工前后都要进行其形状的精密测量以便于指导加工和评定工件是否符合加工要求。在大型装备制造业当中,经常出现要求高精度加工的情况,需要进行高精度测量的大平面,而现有的平面形状误差在线测量系统和方法只适合于测量连续矩形平面,对于工业生产中经常出现的非连续平面,其平面形状误差在线测量目前尚无有效方法。为了实现非连续平面的平面形状误差测量,本文建立了一套平面形状误差在线测量系统和方法,该系统使用电涡流传感器作为距离传感器,以基于数字信号处理器的电路作为数据采集系统,运用工业平板电脑实现误差分离、评定等数据处理；测量方法则在时域最小二乘逐次两点法基础上,提出了自适应误差分离矩阵技术,该技术根据测量数据调整时域最小二乘逐次两点法中的误差分离矩阵,使最小二乘逐次两点法能够用于非连续平面的平面形状误差在线测量,这种最小二乘逐次两点法称为自适应矩阵时域最小二乘逐次两点法。探索了基于不规则频域四点法的频域非连续误差分离算法。通过使用自适应矩阵时域最小二乘逐次两点法,本文实现了对非连续平面进行平面形状误差测量,解决了时域最小二乘逐次两点法只能对矩形被测面进行测量的缺点。通过在实际工作环境下,使用本文所述的非连续平面的平面度误差测量系统对连续平面的平面形状误差进行测量实验,由实验结果可知系统精度良好；使用自适应矩阵时域最小二乘逐次两点法对网格数10乘9的非连续平面模拟采样数据进行误差分离实验,将得到的误差分离结果与标准的时域两点法的误差分离结果相比较。通过比较证明该方法误差分离完整,且不引入额外误差。实验结果证明了非连续平面的平面度误差测量系统精度不大于0.002mm,自适应矩阵时域最小二乘逐次两点法可实现非连续、非规则平面的在线测量。
【Abstract】 Accurate measurement is a key area for high level industrial process. A build block needs to be measured before and after process for guide and to know the result of the processing. There are pressing needs of non-linear surface measurement in heavy industrial equipment production.Most of the current methods of accurate surface form error measurement only work on linear surface, there no available accurate method for non-linear surface. This paper fund an online surface form error measurement system based on Time domain least-square serial two-point method which been upgrade by self-adaptable error separation matrix technique and other methods for uplift its ability to measure non-linear surface. The self-adaptable error separation matrix technique is allowed adjustment being placed automatically to the error separation matrix for non-linear surface error separation without compromise the accuracy of the system.Experiment preformed on a linear surface in a realistic environment shows that the measurement system is accurate. The comparison of the result from the simulation which was being run on a non-linear surface of1.5m*1.35m clearly shows that the method this paper shows didn’t compromise accuracy of the system which means that the method this paper fund able to work on non-linear surface without compromise accuracy.