【作者】 刘建林；

【导师】 张斌珍；

【作者基本信息】 中北大学 ， 微纳技术及仪器， 2012， 硕士

【摘要】 透镜是构成光路系统中基本而又重要的光学元件，它属于被动光学元件，用来汇聚、发散、准直光辐射。透镜阵列是由相同的透镜按一定的顺序排列在一个平面上形成的。传统的透镜体积比较大，属于折射型光学元件，然而，随着MOEMS（微光机电系统）技术的兴起，当前的仪器已经开始朝着光、机、电集成的方向发展，用传统方法制作出来的透镜已满足不了当今科技发展的需求。与球面透镜相比，非球面透镜具有消除像差、成像良好等特点而受到广泛关注，本文在加工球面透镜的基础上设计了非球面透镜的掩模板并对其进行加工。本文首先用光学设计软件ZEMAX对球面透镜与非球面透镜进行了光线追迹，初步模拟出球面透镜与非球面透镜的像差图，从理论上分析其光线传输特性。本文使用SU-8作为光刻胶，采用光刻原理，尤其是斜曝光原理，加工出了主光轴平行于衬底的微透镜及其透镜阵列，单个微透镜的直径可达到300微米。由于SU-8并不是很好的光学材料，本文以SU-8微透镜及其阵列作为母模，用PDMS作为中间模具，最后用一种优质的光学材料（NOA73）进行大量低成本微复制，加工出了光学性能良好的微透镜及其阵列，最后对加工过程中出现的问题进行了分析并给出了优化的方法。论文最后初步给出了透镜阵列的测试结果，包括透镜曲率半径的测量、透镜阵列的表面形貌SEM图及其成像特性，与理论结果进行了比对。更多还原

【Abstract】 Lens is the basic and important optical component in the composition of light pathsystem and it belongs to passive optical components with the function of collecting, divergingand collimating optical radiation. Lens array is formed by the ranking of equivalent lenses onone plane in certain order. The traditional lens is large in size, belonging to refractive opticalelements. However, with the development of MOEMS (Micro-Opto-Electro-MechanicalSystems), current instruments have headed towards optical, mechanical, electrical integration,so lenses made up by traditional ways cannot met the need of technology developmentnowadays any longer.Compared with spherical lens, aspheric lens have drawn more and more attention due tothe good characters of eliminating aberrations and good images. This paper, based on theprocessing of spherical lens, designed and processed the maskplate of aspheric lens.Firstly, the optical design software ZEMAX is used to trace the optical line of thespherical lens and the aspherical lens respectively in this paper and simulate the aberrationcurve of the spherical lens and the aspherical lens. Then analyzed its light transmissioncharacteristics theoretically.With SU-8 as structural material, using UV light photolithography process, especiallyinclined exposure technology, micro lens arrays whose primary optical axis parallel to thesubstrate and the diameter of one single micro lens is about 300 microns. Because SU-8 is notgood optical material, this paper uses SU-8 micro lens and array as mould , applies PDMS asintermediate mould and employs the high-quality optical materials, such as NOA73, toreplicate the microlens and arrays with large quantity and low cost. The micro lens and arrayswith good performance are fabricated and in the last part the problems in the are analyzed andthe optimized methods are proposed.At the end of the paper, the test results of the lens and arrays are proposed preliminaryand compared with the theoretical result.更多还原