【作者】 王彦杰；

【导师】 何海平；

【作者基本信息】 浙江大学 ， 材料科学与工程， 2012， 硕士

【摘要】 制备高质量的ZnMgO以及ZnO/ZnMgO量子阱材料,提高其发光效率,对于实现ZnO基光电器件的应用有很重要的意义。近年来,表面等离激元作为增强材料发光的可行途径,成为人们研究的热点。本论文正是基于这一思想,以ZnMgO薄膜和ZnO/ZnMgO单量子阱为研究对象,对其光致发光性质和表面等离激元增强机理进行深入探讨。本论文的主要研究工作如下：(1)利用脉冲激光沉积方法制备一系列不同阱宽的ZnO/ZnMgO单量子阱,研究了量子约束效应随阱宽的变化规律,并进行了理论计算,发现与实验结果基本吻合；利用金属有机物化学气相沉积方法制备ZnO纳米片结构,对其光致发光性质进行研究,用多能级模型解释激子发射和绿光发射的负温度淬灭效应,并通过分析完成表面缺陷能级的指认,位于导带底以下81meV。(2)利用电子束蒸发技术生长金属薄膜,并结合快速热退火工艺,利用反浸润法制备金属Al和金属Pt的纳米颗粒,研究它们的形貌和表面等离激元特性；我们还利用标准光刻工艺制备Al金属阵列。(3)利用带边发射和Al表面等离激元的共振耦合增强ZnMgO薄膜紫外发光,研究了金属厚度与退火条件对发光增强的影响,当Al金属厚度为2nm时,实现了带边发光3.5倍的增强；经过退火处理后,金属薄膜转变成纳米颗粒,由于能量匹配与散射效应共同作用,ZnMgO薄膜的带边发光增强了4.7倍。(4)通过在ZnO/ZnMgO量子阱表面覆盖Al/Ag双层金属颗粒,利用金属表面等离激元共振耦合增强ZnO/ZnMgO单量子阱发光,通过光致发光对比分析,取得了较好的增强结果,量子阱阱层发光为原来的3倍,垒层发光为原来的6倍。更多还原

【Abstract】 For realizing the application of ZnO-based optoelectronic devices, it is important to prepare high-quality ZnMgO and ZnO/ZnMgO quantum well and improve the luminescence efficiency. Recently, surface plasmons (SPs) have been utilized to enhance the light emission efficiency of semiconductor materials and devices. In this thesis, we concentrated on studying the photoluminescence properties of ZnMgO films and ZnO/ZnMgO single quantum well (SQW) and enhancing the ultraviolet light emitting by SPs coupling. The primary results are described in the following:(1) ZnO/ZnMgO SQW with different well layer thickness was prepared by pulsed laser deposition and the quantum confinement effects were observed. The emission energy dependence of the well layer thickness was calculated by a theoretical model, and the result was agreement with experimental data. Pleated ZnO nanosheets were prepared by metal organic chemical vapor deposition and negative thermal quenching of both the excitonic and green emissions was observed. Based on the model of multi-level transitions, the energy level of surface traps could be extracted, which was 81meV below the conduction band minimum.(2) Metal films were prepared by electron beam evaporation. Using the reverse micellar methods, the Al and Pt nanoparticles have been fabricated. The surface morphology and optical absorption properties have been studied. Al micron- patterns have been fabricated by the standard photolithography.(3) By capping Al on the surface of ZnMgO films, the enhancement of ultraviolet emission has been observed, which can be interpreted in terms of surface plasmon coupling. The influences of the metal thickness and annealing condition on the enhancement effect have been studied. When the metal thickness was 2nm,3.5 folds band edge emission enhancement has been achieved. After annealing, the metal film transformed to nanoparticles. Due to the energy matching and scattering effects, stronger enhancement effect has been achieved (4.7 folds).(4) The Al/Ag bi-layer nanoparticles have been used to enhance the light emission from ZnO/ZnMgO single quantum well. By the surface plasmon coupling, a three folds enhancement of spontaneous emission from well layer and a six folds enhancement of the emission from barrier layer were obtained.更多还原