FMEA失效模式和效果分析在半导体后段工序中的应用

【作者】 戴伟；

【导师】 龚益鸣；

【作者基本信息】 复旦大学 ， 项目管理， 2011， 硕士

【摘要】 FMEA(Failure Mode and Effect Analysis,失效模式和效果分析)是一种用来确定潜在失效模式及其原因的分析方法。具体来说,通过实行FMEA,可在产品设计或生产工艺真正实现之前发现产品的弱点,可在原形样机阶段或在量生产之前确定产品缺陷。FMEA已经成功地应用在军用航空领域、一般工业的产品制造和生产过程设计等领域。针对半导体后段制造既存在系统集成下自动化生产又兼顾大量手动操作的过程,本文着重于寻求一种半导体后段生产中集管理系统、工艺管理、设备管理、的方法。本研究的目的是通过评估半导体后段生产中系统、工艺和设备等3个层面的故障模式,尽量降低生产线故障导致的异常品及停工问题。通过对FMEA理论的分析并结合生产的实际情况,寻找到适合A公司的管理和维护方法,并通过实际工作中的案例进行FMEA分析和操作,进行半导体后段生产环节中的各个失效模式评估,制定出相应的改善措施,提供给工程人员采取事先防范措施,避免或降低失效造成的产品品质问题、设备故障及停线问题,给公司后段工序生产的质量、成本和安全等因素提供保障。本文的研究结果显示,在引入FMEA系统分析方法后,系统故障、产品质量问题、工艺设备问题、人为操作失误等各层面异常有效降低,有效实现了质量、成本和效率的平衡。更多还原

【Abstract】 FMEA (Fail Mode and Effect Analysis) is a kind of method used to identify potential failure modes and do effect analysis. By implementing FMEA, the weakness and the fault of the products can be found out before product design or manufacturing period and the prototype of a product can be determined whether potential fault before mass production has. FMEA have been successfully used in military aviation, general industrial products manufacturing and production process design and other fields.Semiconductor manufacturing has the extremely high concentration of not only automation management but also manual operation. The thesis is to reduce the quality issue and tool downtime ration by applying a quality management tool to system management, process management, equipment management and manual operation management in semiconductor. By the analysis of FMEA theory and real samples in A corporation, a series of effective and useful countermeasure can be found and taken. After the countermeasure is taken, every potentional quality risk can be effectively controlled to improve the product quality and improve product throughput.This thesis shows FMEA is an effective management tool in semiconductor back-end production. With the good understanding and application of FMEA theory, yield improvement, cost-down and efficiency improvement can be realized.更多还原