【作者】 王维坊；

【导师】 文东辉；

【作者基本信息】 浙江工业大学 ， 机械电子工程， 2012， 硕士

【摘要】 纳米力学性能是研究纳米材料、器件与结构的重要参数之一，已成为纳米技术的重要研究内容。随着微电子、信息、智能系统等逐步向微型化发展、纳米器件的广泛应用、纳米系统性能的深入研究，都迫切需要纳米力学来提供可靠性设计的理论基础。因此高质量，无污染纳米力学试样的制备成为亟待解决的难题。为此本文以制备高质量的纳米力学试样为目的，采取了一种全新的以声悬浮为基础的抛光方法，经过声悬浮抛光的试样表面粗糙度达到0.287nm，且表面无腐蚀，比传统抛光方法制备的试样质量要高，损伤层有所降低。本文主要的研究内容有：1．根据理论分析设计了一套声悬浮抛光实验平台，包括超声波发生系统、悬浮抛光容器以及机架结构部分。选择了超声波换能器种类以及结构，根据超声频率以及波长设计了超声变幅杆。并通过ANSYS模态分析验证所选换能器以及变幅杆的可行性。2.根据研制的声悬浮抛光装置，对抛光容器内的磨粒流场进行研究，并对磨料粒子冲蚀工件表面的能量进行研究，建立磨料冲蚀工件表面的理论模型。同时对抛光液的性能进行研究。3．通过不同抛光方法进行试样制备，对比不同试样制备方法的加工效果，并通过SEM、AFM等测试方法对试样表面形貌观察对比，从而验证声悬浮抛光的有效性。更多还原

【Abstract】 Nanomechanical properties is one of the important parameters to study of nanophasematerials, components and structure. It has been become an important content ofnanotechnology. With the development of microelectronics, information, intelligent systemgradually to miniaturization, the wide application of nano-device and thorough research ofnanosecond science and technology, they are need to nanomechanics to provide theory basisof reliability design. Therefore, prepare a nanomechanics model of high quality and nocontamination has been a difficult problem need to solveFor the purpose of prepare a nanomechanics model of high quality, this paper adopt anew polishing method based on acoustic levitation. The surface roughness is 0.287nm afteracoustic levitation polishing, and no contamination in the surface. It has a high-qualitysample preparation than traditional polishing method.The main research content of this article as follows:1. According to the theoretical analysis, this article design a set of acoustic levitationpolishing experimental platform, including the occurrence of ultrasound systems, containerfor suspension polishing and frame structure. At the same time, choose the type of ultrasonictransducer and the structure. According to the ultrasonic frequency and wavelength, designthe ultrasonic horn. Through ANSYS model analysis to verify the feasibility of horn.2. According to the development of acoustic levitation polishing device, to study theabrasive flow field in the container. this article research the erosion energy of the abrasiveparticle to the surface, and establish a theoretical model. At the same time to study theperformance of slurry.3. By different polishing method for sample preparation, and comparing differentmethods of sample preparation processing effects. Through SEM, TEM and other tests toobserve the surface morphology on the specimen, to verity the effectiveness of acoustic levitation polishing.更多还原