【作者】 陈瑶；

【导师】 巴德纯； 刘坤；

【作者基本信息】 东北大学 ， 流体机械及工程， 2009， 硕士

【摘要】 近年来,随着真空技术的飞速发展及相关领域需求的提高,人们开始研制各种类型的能够代替高真空机组工作的高真空直排大气干泵,该泵可以且一部分已经应用于半导体工业、分析仪器、电子工业等各个领域。本文以一具体的高真空直排大气干泵的设计为例,介绍了该泵的结构组成、工作原理,并主要针对其中的旋涡级进行了内部流动特性的研究。另外,由于该泵工作转速较高且为卧式结构,故有必要对该泵的转动系统进行振动特性研究,并进行适当的结构尺寸调整。针对于结构设计部分,这里采用牵引抽气及旋涡抽气相结合的结构,传动部分采用直联内置电机的形式。对于这里的旋涡级抽气结构,由于关于其理论及设计方法的研究目前仍不成熟,因而有必要对旋涡级(或称旋涡泵)抽气结构做近一步的研究,用研究结果来指导实际的设计工作。这部分的主要工作包括：1.简要介绍了旋涡泵的工作原理及内部流动理论。2.利用Pro/ENGINEER软件对旋涡泵的流动区域进行三维造型,利用流体力学软件GAMBIT对旋涡泵内部流动区域进行结构网格划分3.采用RNG k-ε湍流模型,利用FLUENT软件对不同设计参数的内部三维湍流流场进行数值模型。研究了旋涡级抽气结构的内部流动规律,掌握了旋涡泵流动区域内压力场与速度场的分布情况。4.根据计算结果对旋涡级结构及尺寸进行了结构选型。对于该泵转动系统的振动特性分析,由于计算对象为一装配体,故这里采用模态综合法计算其各阶的固有频率。这部分包括对模态综合法的介绍及一般求解过程,对该系统进行的模态分析,根据计算结果校验其振动特性是否满足结构要求,并进行适当的修改。更多还原

【Abstract】 In recent years, as the vacuum technology develop fleetly and the elevation of the customs’needs, the people start to develop various types of high vacuum dry pumps, which can and already widely used in the semiconductor industry, analytical instruments, electronic industries.Here we take the design of the high vacuum dry pump as an example, and introduced the pump’s structures and its working principle, especially studied the performance of vortex. Moreover, because of the high rotating speed and its horizontal structure, it is necessary to study the rotor system’s vibrancy and do some modification in dimension.For the structure designing part,we applied holweck stage and vortex structure For the driven part I applied one axis and put the engine inside.For the vortex structure, because of there is not enough information about its theory and designing method to catch, so it is necessary to study more of the structure, and we can use the results in designing work. For this part what I have mainly done as follows.1. Introduced the vortex pump’s working principle and flowing theory inside the channel.2. Make the model of the flowing zone with pro/Engineer, and meshed the zone use GAMBIT.3. Based on the RNG k-εturbulence model, use FLUENT to calculate the inner flow of vortex pump with different design parameter. Through the numerical simulation, we can study the internal flow law of vortex pump, and learn the pressure and velocity distribution in the channel.4. Optimized the structure and the dimensions of the vortex pump based on the results.In the study of the rotor system’s vibrancy, because it is a assembly, we need to use the Component Mode Synthesis to get the natural frequency of the system. In this part we introduced what the Component Mode Synthesis is and its common process, the analysis process. At last we check the natural frequency of the system whether allowed for the design rules, if not, we got some changes.更多还原