【作者】 宋晓峰；

【导师】 邵春雷；

【作者基本信息】 中国科学院研究生院（长春光学精密机械与物理研究所） ， 机械制造及其自动化， 2010， 硕士

【摘要】 TEA CO₂激光器采用脉冲重复频率工作制式,可同时兼有高平均功率、高重复频率和高峰值功率,在工业、国防和科研等领域具有重要的应用价值。随着高功率TEA CO₂激光器技术的不断发展,在很多领域的应用日趋增多,对其功能要求也不断增加。例如,在激光与物质相互作用的研究中,人们不仅需要输出中心波长10.6μm的激光,还需要输出中心波长9.3μm的激光,以研究在相同的输出功率（能量）下不同波长激光对物质作用的效果。因此,为了提高高功率TEA CO₂激光器的应用范围,更好的研究双波长输出技术,为以后工程实际应用打下基础,进行高功率TEA CO₂激光器的双波长输出技术的研究是非常必要的。本文基于传统波长选支方法不能满足输出高功率激光的不足,提出了新的波长选支输出技术——输出窗口镀膜选支技术,对该技术的原理进行了详细的介绍,应用该原理设计了10.6μm和9.3μm的镀膜特性曲线,并利用一台高重复频率高平均功率TEA CO₂激光器,进行了中心波长9.3μm和10.6μm激光的选支实验研究,在此基础上设计了双波长密闭免调切换窗口结构装置,实现了在一台激光器上密闭免调切换输出10.6μm和9.3μm两个中心波长的激光。利用有限元软件MSC.Patran/Nastran对该切换移动平台组件进行静力学分析、模态分析、热应力分析及热力耦合分析。然后对该结构进行优化改进,使分析结果满足精度要求。并对改进后有限元分析结果中的镜面变形结果数据,基于齐次坐标变换原理和最小二乘法原理,使用MATLAB软件进行曲面拟合,得到整个镜面绕三个坐标轴的倾斜角度。更多还原

【Abstract】 TEA CO₂ laser with pulse repetition frequency style can realize high average power, high repetition frequency. And it has great value in industry, national defense, scientific research and so on. With the continuous development of TEA CO₂ laser technology, the more applied in laser processing, laser lidar, laser pushing, laser transmission and laser chemistry. Also people have more and more demands for its function. For example, in order to study the matter’s effect on different wavelength with the same power, people need not only 10.6μm laser output but also 9.3μm laser output in laser interaction with matter research. So in order to improve the application scope and lay the foundation for future, it is necessary to do research on TEA CO₂ laser with two shift output coupling mirrors.A new method to choose wavelength named“coating and selecting wavelength technology on output window”is proposed on the basis of traditional method’s deficiency. The 10.6/9.3μm coating curve is designed according to the detailed principle. And this method is proved correctly by experimental research. Also the two wavelength output coupling mirrors structure is designed based on this method.The analysis has been done on the main structure through static analysis, dynamic analysis, thermal analysis and thermal-stress analysis by MSC. Patran/ Nastran software. Then optimize this structure to satisfy its precise specifications. At last the mirror tilt angle is required through the principle of least square method and homogeneous cordinate transformation method by MATLAB software.更多还原