【作者】 潘鹏胜；

【导师】 杨斌堂；

【作者基本信息】 上海交通大学 ， 机械设计及理论， 2012， 硕士

【摘要】 随着科学技术的飞速发展,尤其在精密光学工程、半导体制造、超精密微细加工与测量技术、航空航天技术等诸多尖端科技领域,越来越需要一种高性能的精密直线驱动技术。本课题正是基于这种背景下提出了一种“小型超精密超磁致伸缩直线电机”。直线电机基于尺蠖运动原理,并以超磁致伸缩驱动器(Giant Magnetostrictive Actuator,GMA)为驱动核心元件。本文以直线电机为研究目标,从基础理论、结构设计与优化分析、实验测试及相关控制技术几方面进行了系统的研究。第一章首先介绍了直线电机的特点与分类,并对新型直线驱动技术的发展做了归纳,而后简述了超磁致伸缩材料的特性与磁滞模型及尺蠖直线电机的原理与分类。第二章首先给出了小型尺蠖直线电机的设计要求,并依据设计要求阐述了电机的总体结构方案设计、中间推动部分与箝位机构的方案设计以及导轨方案设计,并对GMA进行详细设计。第三章描述了直线电机的关键部件——箝位机构中的杠杆型柔性位移放大机构和中间推动部分桥式柔性位移放大机构的详细设计、优化分析与实验验证。第四章根据超磁致伸缩直线电机的机械结构和超磁致伸缩材料的材料特性建立了电机的动力学模型,并利用MATLAB/SIMULINK软件实现了电机在变幅值和变频率的输入信号激励下的仿真研究。第五章首先介绍了实验设备与原理以及实验平台的搭建情况。而后介绍了直线电机的实验测试,主要测试了直线电机的速度特性、运动分辨率以及往返复位情况,并对实验数据进行了分析。第六章在前文所建立的动力学模型和实验测试所得数据的基础上,提出了实现超磁致伸缩直线电机精密定位的控制方法,进行了单步跨距控制实验,最后分析了影响定位精度的相关因素。第七章对全文的工作内容进行总结,并对后续研究进行展望。更多还原

【Abstract】 With the development of modern science and technology, there is an increasing demand for active-materials-drive linear motor in the cutting-edge field of precision optical engineering, semiconductor manufacturing, super precision microfabrication and measuring technology and astronautic industries in nowadays. In this background, this thesis presents a magnetostrictive inchworm linear motor which has the potential to secure a long stroke with mini size and nano-metric positioning. The design of the magnetostrictive inchworm linear motor is based on inchworm motion principle and giant magnetostrictive actuators (GMA). In this thesis, the research on the linear motor includes basic theory, structural design and optimum analysis, experiments and control system of the motor.Chapter 1 introduces the characteristics and classification of linear motor and summarizes the development of the technology of linear driver technology. and then briefly describe the characteristics and hysteresis model of giant magnetostrictive material and principle and the classification of inchworm linear motor.Chapter 2 raises the design requirements of the mini giant magnetostrictive inchworm linear motor firstly, then recounts scheme of the global motor, the pushpart, clamping mechanism and the guiderail of the motor system and presents the detail design of GMA.Chapter 3 introduces the detail design, optimization and experimental verification of the critical parts of the motor, which are the lever-type flexible displacement amplification mechanism (DAM) of clamping part and the bridge-type flexible DAM of push part. Chapter 4 establishes the dynamic model of the magnetostrictive inchworm linear motor according to the motor’s mechanical structure and characteristic of GMM. The model may be used to simulate the dynamic motion of the linear motor on input signals at different amplitudes and different frequency. The simulating results will be used to compare with the experimental results and to do locomotion analysis of the general motor system.Chapter 5 introduces the experimental facilities and the setup of the experimental platform firstly, then the speed performances, positioning resolutions and reset states of backwards and forwards are checked with experimental tests and the experimental data are analyzed at the end of the chapter.Chapter 6 presents the tests based upon the research work in chapter 4 and in chapter 5, and a step-span positioning closed loop control system is created in an attempt to realize the nano-metric positioning. The related experiments are carried out and the positioning error is discussed.Chapter 7 summarizes main work of the thesis, and discusses the further researches finally.更多还原