【作者】 李露波；

【导师】 唐霞辉；

【作者基本信息】 华中科技大学 ， 光学工程， 2011， 硕士

【摘要】 大功率电子管是自激式射频激光电源的核心器件。电子管灯丝电流的大小和稳定性,电子管栅极电流以及电子管的冷却决定了整个射频电源是否能正常工作。本论文旨在深入研究大功率电子管栅极和阴极回路特性,达到工程化应用水平。主要内容包括:(1)分析了射频电源的整体结构和功能。根据电子管灯丝电流的要求,设计出了合理的高精度、高稳定性、大电流的灯丝变压器,为电子管灯丝提供稳定电流源。(2)设计了高精度的灯丝稳流装置。根据灯丝电流稳定度和可调性的要求,开发了可以调节灯丝电流的稳流板。通过对灯丝变压器的初级端的电压控制达到控制灯丝变压器次级即灯丝电流的大小。根据可控硅调压模块的输出端受控制信号控制的作用,使可控硅的输出端可以在300~380V可调。可控硅的控制信号使用积分比较电路,实现输出的控制信号与给定的信号相同,达到控制信号可调的目的。(3)研究了射频电源电子管栅极元器件的特性。根据射频电源电子管栅极电流以及栅极信号滤波的要求,设计出了合理的栅极限流电阻,栅极滤波电感以及保护电路的参数。使用PSpice软件对电感的滤波效果进行了模拟仿真。(4)设计了合理的电子管冷却系统。通过对射频电源电子管的损耗分析,设计出了风冷和水冷系统。风冷系统主要针对电子管外围电路中的冷却,水冷系统针对电子管内部的冷却。在水冷系统中还分析了水质量对射频电源的影响。本论文开发的大功率射频电源质量和稳定性对于射频板条CO2激光器的输出光功率及其稳定性具有决定性作用。更多还原

【Abstract】 High power electronic tube is the core component of the self-excited RF laser power supply. The power supply is determined by the tube filament current, grid current and cooling system. This thesis aims at researching on circuit properties of the grid and the cathode for engineering application. The main contents of the thesis are as follows:（1） The whole structure and function of the RF power supply have been analyzed. High- precision, high-stability and big-current filament transformer has been designed, it provides a stable current source for the tube filament.（2） High-precision filament steady current system has been designed. According to the requirement for the stability and the adjustability of the filament current, the steady current plate that can control the measurement of the filament current has been designed by adjusting the voltage at the primary side of the filament transformer. The output voltage of the SRC can be arranged from 300V to 380V according to the principle that the output voltage of the SRC is determined by the control signal. The control signal uses PID to make sure that the control signal equals the given signal, to make the control signal adjustable.（3） The characteristics of the components in the grid of the electronic tube have been studied. According to the requirements of the current and signal filter in the grid, the current-limiting resistance, the signal filtering inductance and the protecting circuit have been designed. The result of the filtering inductor has been simulated by PSpice.（4） A cooling system has been designed for the electronic tube. The air-cooling and water-cooling systems have been designed by analyzing on the heat loss of the electronic tube. The air-cooling system is employed for the peripheral circuit and the water-cooling system is used for the interior. In the water cooling system, the impact of water quality on the RF power supply also has been analyzed.The quality and stability of high RF power supply which this thesis developed directly affects the output laser power and beam quality of the RF slab CO₂ laser.更多还原