【作者】 姜宁；

【导师】 张建军；

【作者基本信息】 河北工业大学 ， 机械工程， 2011， 硕士

【摘要】 本文在分析了满足现状发展的硅片传输机器人技术与设备基础上,研究了一种动平台可连续回转的三自由度并联机器人机构。在机构构型之后,研究了该机构的自由度、运动学建模与仿真、尺度综合、动力学建模与仿真等关键技术,为硅片搬运机械手样机的设计和平台建造提供了理论基础,论文主要研究内容如下:第一部分分析IC产业对硅片搬运机器人的需求并结合串并联机器人的优缺点,研究了一种并联形式的硅片传输机器人机构(称它为类SCARA动平台可连续回转并联机器人)。与传统的并联机器人相比,该机构采用3个支链嵌套而成,其动平台可以实现360 ?连续回转以及机械手的径向进给动作。以螺旋理论为基础,写出了机构各支链的螺旋系,然后求得相应的反螺旋,最后利用修正的Grübler–Kutzbach(G-K)公式计算出了类SCARA并联机器人的自由度,完成了机构的构型。第二部分在柱坐标中,建立了并联闭环机构的位置、速度、加速度模型,在此基础上分析了该机构的奇异位型,并对末端机械手的位置、速度和加速度进行了仿真,得到了末端机械手的运动变化曲线。通过结合雅克比矩阵条件数全域均值性能指标与波动幅度性能指标构造出全域综合性能指标,构建约束条件并给定初值范围。调用MATLAB工具箱中的fmincon函数优化出了满足约束条件的杆长,并通过仿真验证了优化的正确性。第三部分在分析各个构件动能与势能的基础上,利用拉格朗日方程建立了机构的动力学模型并进行了必要的仿真,得到了伺服电动机驱动力矩的变化规律。更多还原

【Abstract】 In this article, a three-DOF parallel manipulator with mobile platform rotating continuously is proposed, which is based on the trends of wafer handling robots. After the institutional constructed, it deals with its degrees of freedom, kinematic analysis, dimensional synthesis, dynamic analysis and some other key technologies. It provides a theoretical basis for the design and platform construction of wafer handling robots prototype, the main contents are as follows.Firstly, through the analysis of the demands for wafer handling robot in IC industry and combining with the advantages and disadvantages of series-parallel robot, it studies a new wafer handling robot which structure is parallel (it named for the similar-SCARA parallel manipulator with mobile platform rotating continuously). Compared with the traditional parallel manipulators, the peculiarities are that the three limbs are embedding together and the mobile platform can achieve 360 degree rotation continuously. Besides, it can translate along a leader-rail in radial direction. Based on screw theory, it writes the screw system of each limb and then obtains the corresponding anti-screw. Finally, it calculates the degrees of freedom by using G-K formula which has been modified and completes the configuration of institutions.Secondly, we established the position, velocity, acceleration model of the parallel loop body in the cylindrical coordinate, then analyses its singularity position and simulates the position, velocity and acceleration of the manipulator’end, the result of simulation showed the variation of it. Considering both the mean value and fluctuation of the condition number of Jacobian matrix, a global conditioning index is proposed. Meanwhile, a set of constraints has been built and given the initial value. We get rod length witch satisfies the constraints by MATLAB and verify the correctness of the optimization.Thirdly, based on the analysis of the kinetic and potential energy of each component, the dynamic model of mechanism is established and some necessary simulations are carried out by using the Lagrange equation , finally we can get the variation of the torque which is driven by servo motors.更多还原