【作者】 高大为；

【导师】 闫永达；

【作者基本信息】 哈尔滨工业大学 ， 机械制造及其自动化， 2011， 硕士

【摘要】 近些年来,人们对AFM(原子力显微镜)的研究越来越多,尤其是AFM从测量领域扩展到加工领域以后,利用AFM进行微纳米结构的加工研究,已经成为微纳米加工中重要的一个研究领域。目前,小范围内基于AFM微纳米结构加工方法的研究已经相对成熟,但是由于AFM自身压电陶瓷具有迟滞性、非线性,限制了它的加工范围,基于此,实验室已经搭建了一套AFM和高精度二维工作台的新型大范围纳米加工系统,利用这套系统进一步研究,以便于可以利用AFM加工更多大范围微纳米规则结构,对进一步扩展AFM的应用具有很大意义。本论文就是利用已经搭建起来的新系统,对大范围微纳米聚合物结构的加工进行研究,首先,在小范围内对两种聚合物PMMA(聚甲基丙烯酸甲酯)和PC(聚碳酸酯)的加工,利用单因素实验和正交实验相结合的方法,主要对力、进给量、加工方向和速度几个参数进行参数优化,加工的结构主要是纳米线结构以及微方坑结构。然后,针对AFM自身加工的局限性,对AFM自身程序进行开发,并且实现AFM与工作台联合控制。将AFM与二维工作台通过串口通信,并对工作台进行VB编程通过工作台指令实现对工作台的控制,然后将AFM与工作台通过主机利用VB程序联合控制,以实现更多复杂结构的自动化加工。最后,进行如何实现更好的一致性加工结果进行研究,通过PID调节等解决工作台振动问题,通过大量大范围实验研究针尖磨损以及针尖对软样品的粘结,并对加工结果进行分析,探索出大范围加工过程中微纳米结构变化的规律和针尖磨损的影响,并针对研究结果在加工过程中进行补偿,最终可以实现一致性很好的大范围微纳米聚合物结构的加工。更多还原

【Abstract】 In recent years, more and more researchers did some studies on AFM. Especially when the research field spreads from the measurement field to the machining field, machining micro-nanometer structure by AFM had become an important research area in the field of micro-nanometer processing. At present, machining micro-nano structures by AFM within a small scale had been studied in detail. However, the machining scale of the structures is limited because of the hysteresis and nonlinear of the piezoelectric ceramics of AFM. On this basis, a new system with a high precision two-dimensional stage is set up by which researches can go on and many micro-nanometer regular structure in a big scale can be machined. All these play an important role in extending the application of AFM.This thesis aims to do some research on micro-nanometer polymer structure machining in a big range by the new system. First, machining the two kinds of polymer PMMA and PC in a small scale, The Taguchi method and single factor analyze method are employed. The main purpose is to optimize force, feed rate, machining direction and speed. The machined structures are nanoline structures and micro square hole structures.Then, in view of the machining limitation that AFM had, the software program that AFM itself must be developed and improved. What’s more, combination control of AFM and stages can be realized. AFM and two-dimensional stages get connected through the serial communication. Procedure of the stage is programmed by the program VB. The stage can be controlled by the corresponding instructions. Then, the AFM and stage can be controlled by a host computer through the VB program to realize automatic processing of more complex structures.Finally, do some research on how to realize the better consistent processing results. The problem of stage vibration is solved by the PID adjustment, and do some research on tip wear and soft material that adhere to the tip through plenty of machining experiments in a large scale. The law that how the micro-nanometer structures influence the tip wear through the machining result analysis is achieved. Making up some compensation during the processing, at last, micro-nanometer large-scale polymer structures processing with better consistency can be realized.更多还原