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基于DMD的微小型近红外光谱仪系统研究
Research of Nir Miniature Spectrometer System Based on DMD
【作者】 莫祥霞；
【导师】 温志渝；
【作者基本信息】 重庆大学 ， 光学工程， 2011， 硕士
【摘要】 随着光谱仪技术的飞速发展,微小型近红外光谱仪以其体积小、成本低、快速高效、在线检测等特点,成为了现代检测仪器的研究热点。本文提出基于DMD(数字微镜)新原理的微小型近红外光谱仪研究,具有重要理论意义与实际应用价值。论文在分析研究国内外微小型近红外光谱仪发展的基础上,提出一种基于DMD面阵的单探测器微小型近红外光谱仪系统方案;开展了基于DMD的微小型近红外光谱仪分光成像系统的设计与优化、系统结构设计与微结构加工、装调、标定等关键技术研究;研制出基于DMD的微小型近红外光谱仪原理样机,测试结果表明,光谱仪波长范围为1000-1780nm、分辨力小于20nm。论文的主要研究工作是:①在分析国内外微小型近红外光谱仪光学系统的基础上,提出了基于DMD新原理的微小型近红外光谱仪系统方案;②在研究数字微镜的工作原理与特点的基础上,确定了光谱仪的光学系统方案以及相应的光学元器件;采用ZEMAX光学设计软件进行光源和分光成像系统设计及优化,实现了系统的像差校正和光学系统的小型化;③从衍射限制、空间采样率以及光栅谱面等方面进行了系统优化设计,获得狭缝宽度最优值;采用MATLAB数学软件建立DMD的光学模型,进行了仿真与实验,完成了编码误差的校正;④完成了微小型近红外光谱仪的微结构设计与加工、原理样机装调以及波长标定,测试结果表明:波长范围1000-1780nm,光谱分辨力小于20nm。
【Abstract】 Under the rapid development of the spectrometer technology, NIR Miniature spectrometer, which is compact, low-cost, fast, online detecting, becomes the research hot spot of the modern detective device. At present, the key points of the miniature spectrometer are controlling the core device, enhancing SNR, decreasing the price. To solve the problems, this paper focus on the research of NIR Miniature spectrometer based on digital micro mirror device(DMD), which has significant value on science and practical application.According to the analysis of the miniature spectrometer both International and domestic, a NIR Miniature spectrometer based on DMD is proposed with a single detector. Both light system and dispersed system of the NIR Miniature spectrometer is designed and optimized. The research on the fabrication and calibration is carried out. Finally, the prototype is developed successfully. The paper mainly covers work as following.①After the study of NIR Miniature spectrometer both home and aboard, propose the scheme of the NIR Miniature spectrometer system.②On the based of the principle and specialties of the micro mirror arrays, propose the structure of the NIR Miniature spectrometer. Choose optical component. Use ZEMAX optical software to design and optimize the light system and the dispersed system. The aberration is reduced.③In order to improve the resolution of this spectrometer, this paper gives the analysis of the new effects which is caused by micro structure, and optimal values of the key factors.④Finish the fabrication and calibration of the prototype. Its range of wavelength is 1000-1780nm, the resolution is less than 20nm, and the absolute error is 3nm.