【作者】 万佩；

【导师】 秦岚；

【作者基本信息】 重庆大学 ， 仪器科学与技术， 2011， 硕士

【摘要】 本文研究了一种在四层平板之间并列分布多个压电陶瓷驱动器,通过控制压电驱动器产生微驱动,最终实现六自由度微定位的新方法。本文的主要研究工作包括:①在分析研究国内外现有微定位方法的基础上,研究了一种空间分布压电陶瓷驱动器的六自由度微定位新方法。完成了定位原理的推导,建立了位姿控制模型。在四层工作台间并列分布十二个压电陶瓷微驱动器,每层工作台上的四个压电陶瓷微驱动器均布在半径为l的圆周上。根据位姿控制模型,压电陶瓷微驱动器通以不同电压,使其分别产生伸长或缩短,各驱动器同时作用,形成微定位机构目标工作台在不同方向上的微动。②采用MATLAB软件计算位姿控制模型,得到六自由度方向需要产生位移yi时,各压电陶瓷微驱动器的应提供的伸缩量Δhi;通过ANSYS软件建立微定位平台实体模型,改变各驱动器参数(参数变化值等于Δhi),监测目标工作台位移变化yk;验证微定位原理与控制模型的正确性和方案的可行性。③针对压电陶瓷驱动器特殊的负载特性,研究了压电陶瓷驱动电源,可实现多路压电陶瓷微驱动器同时驱动。介绍了主要的电路,进行了放大电路的仿真和分析,完成了放大电路的基本调试。该压电陶瓷驱动电源具有一定的实用性和创新性。④研究了单个压电陶瓷微驱动器的复合控制方法,使驱动器取得了较高的定位精度。针对压电陶瓷器件在精密定位控制中存在的迟滞、蠕变和位移非线性等不足,将Preisach前馈控制和PID反馈控制相结合,分别完成了Preisach和基于积分分离PID控制的实际编程,并完成了实验验证工作。本文的研究工作可为精密调整及微进给提供新的思路和方法。更多还原

【Abstract】 A novel method of Six-DOF micro positioning with PZT actuators have been studied, multi PZT actuators have been distributed spatially and applied voltage, six-DOF micro positioning finally has been realized.The major research works completed in this dissertation include:①Based on the research of micropositioning at home and abroad, a novel technique of six DOF(degree of freedom) micro positioning with PZT actuators have been put forward. The author studied the principle of micropositioning and created the position control matrix. Twelve PZT actuators are distributed spatially among four work platforms, and in each layer there are four PZT actuators placed on the circumference with radius of l . Based on position control matrix, PZT actuators expanse or contract by appling different voltage, finally, micro movement in different direction are formed.②MATLAB was used to calculate position control matrix, expansion and contraction quantity of each PZT actuators was gained when the objective platform occurs displacement yi . Then, solid model of micropositioning platform was created in ANSYS, the displacement y k of platform was tracked by changing PZT actuators’parameter. It verified the principle and programme of micropositioning.③Based on special load characteristic of capacitance, a novel PZT driving power was studied, the main circuit was introduced, emulation, analysis and testing of amplifying circuit was carried out . The driving power has practical application and innovation.④Composite control of PZT actuators was introduced, and high position accuracy was obtained.The combination of Preisach and PID was put forward to overcome the shortcomings such as hysteresis, creep and nonlinear of displacement existing in precision positioning control. Programs of Preisach and the Integral Discrete PID were completed.The research provides new thought and new method in precision adjusting and micro feeding.更多还原