【作者】 张晓皓；

【导师】 唐霞辉；

【作者基本信息】 华中科技大学 ， 物理电子学， 2010， 硕士

【摘要】 射频激励板条CO₂激光器在激光加工领域得到了广泛的应用。要使射频激励板条CO₂激光器能够长时间稳定的运转,必须对激光器信号进行精确的检测与控制。本文旨在分析设计大功率激励板条CO₂激光器人机界面和信号检测系统。研究了大功率射频激励板条CO₂激光器信号检测系统的气压检测、整机各部分温度的检测、光功率的检测、水流量和水压的检测、激光器射频电源的检测以及人机界面的设计。具体包括以下内容:（1）设计了射频激励板条CO₂激光器整机检测系统。分析了射频激励板条CO₂激光器的水路系统,气路系统和光路系统结构。根据激光器的系统结构和原理设计了激光器检测系统总体框架、水冷却系统水流量和水压力信号的检测方案、光功率检测方案、真空系统信号的检测方案、激光器整机温度信号的检测方案和实验。根据激光器检测系统的要求进行了传感器的选型,安装和检测电路的设计。（2）设计了激光器射频电源信号的检测系统。研究了自激式电子管射频电源的主要参数。根据射频电源的原理设计了射频电源检测系统总体框架、射频入射功率,反射功率检测方案和屏极高电压的检测方案,进行了传感器的选型和检测电路的设计。（3）设计了射频激励板条CO₂激光器触摸屏人机操作界面。根据激光器信号检测控制系统的要求进行了人机界面触摸屏的选型,详细分析了MT506型人机界面的特性。设计并完成了激光器控制系统各功能在触摸屏上的实现。根据激光器控制系统的要求和工作原理用九个菜单界面的设计完成了系统的控制,报警,显示,保护和通信功能。更多还原

【Abstract】 RF excited CO₂ laser is used in field of industrial laser processing extensively. Unless precise detecting and controlling of its parameters have been carried out, RF excited CO₂ laser can’t operate stably for a long time. The thesis aims to design the signal detection system of the measurement and Man-machine Interface for the laser.The thesis aims to develop signal detection and Man-machine Interface for the RF-excited CO₂ Laser. The selection of critical technology and components, detection and control of signals, measurement and control of pressure, detection and control of water flow, temperature, laser light power, and technology of human machine interface have been researched. The main achievements of the research are shown as follow:（1） The structure and operation principle of the laser have been analyzed. And the laser measurement system has been designed on this basis, which includes four parts: the measurement of water flow; the measurement of pressure; the measurement of temperature; the measurement of laser light power. Considering the characteristic of the Laser specific sensors have been chosen. According to different components and signals, the signal collecting circuit has been designed.（2） The detection and control system of laser power signal has been designed. The principles, structure and the main parameters of RF power supply have been analyzed. According to the principles of RF power supply, detection programs of the main parameters which includes the RF input power, RF reflection power and the high-voltage of the plate of electronic tube have been designed.（3） The human machine interface has been designed. According to the request of the control system of RF-excited CO₂ Laser, the Weinview MT506 touch-screen has been chosen. The alarm, display, protection and communication capabilities of the control system are completed Within 10 menus.更多还原