【作者】 胡锐军；

【导师】 陈迪； 陈翔；

【作者基本信息】 上海交通大学 ， 微电子学与固体电子学， 2011， 硕士

【摘要】 细胞研究对癌症、艾滋病等重大疾病的研究十分重要,提供一种方便、快捷的细胞捕获和检测方法将促进细胞生物学的发展。将MEMS技术用于细胞生物学基础研究以及小型化生物仪器研究意义重大。本文利用MEMS技术制做了一种基于微磁珠技术的细胞捕获芯片,提出了一种基于悬臂梁控制、电容式力学检测的细胞操作平台,并开发了一种用于细胞生长环境检测的光学检测系统,其内容主要包括：1.介绍磁珠捕获理论,提出MEMS芯片结构模型,并使用仿真软件模拟了芯片工作性能；使用MEMS制作加工细胞捕获芯片,采用结肠癌细胞以及CD4细胞对芯片功能进行测试,并得到结肠癌细胞在0.1 ml/h流速下捕获效率达到92.3%。2.使用MEMS工艺制作加工用于细胞微操控力检测的MEMS电容,使用仿真软件模拟其力学、电学性能,并搭建了微电容测量电路。3.利用单片机、Arduino开发板、VB程序以及LED和PD等搭建用于细胞生长环境微光检测的小型化透射光检测系统；对系统进行环境测试和蓝光信号测试,并使用黄色染料进行了浓度测试。本文提出的细胞捕获芯片具有微量化以及便于操作等优点；采用MEMS电容式力敏传感器控制微力、将悬臂梁用于细胞微操作的平台易于细胞研究；而基于LED和PD的细胞环境检测平台研究能够推动细胞检测设备往小型化发展。本文的研究对细胞生物学基础研究及临床检测的发展有重要的意义。更多还原

【Abstract】 Cell research is an important part in disease research such as cancer and AIDS. It will help to develop cell biology to give a convenient and fast cell capturing and detecting method. It is meaningful to use the MEMS technology to research cell biology and biological device miniaturization.This paper uses MEMS technology to fabricate a kind of cell capture chip based on immunomagnetic bead technology, proposes a platform which uses MEMS cantilever to manipulate cell and uses capacitance micro-force sensor to test force, and develops a kind of optical detection system for detecting cell growing condition. The main contents include as following:1. Magnetic capture theory, Bio-MEMS chip’s performance simulation and its fabrication process is introduced, and this chip’s function test using cancer cells and CD4 cells is discussed. The cancer cells’capture efficient is 92.3% at the 0.1ml/h rate.2. The fabrication of MEMS capacitance which is used to test cell’s micro control force is introduced. Their mechanical and electrical properties simulation and the canpacitance test circuit is discussed.3. The optical detection system for cells growing condition test by Micro Computer Unit, Arduino development board, VB, LED and PD is set up. The environment test, blue light test and yellow dye solution test is discussed.This MEMS cell capture chip needs only small volume of sample, and is operated easily. The cell manipulation platform composed of MEMS cantilever and capacitance micro-force sensor is useful for cell research. And the optical detection system for cell’s growing condition test could promote the miniaturization of biological testing equipment.更多还原