【作者】 陈凌之；

【导师】 程秀兰；

【作者基本信息】 上海交通大学 ， 微电子学与固体电子学， 2011， 硕士

【摘要】 先进的微纳米加工技术使得悬臂梁等器件在生物检测领域有了越来越广阔的应用,但是传统的信号读取方式却限制了这项技术的发展。光学检测技术难以集成,而基于压阻效应的电学检测技术的灵敏度难以满足要求。针对此现状,本文提出了一种悬臂梁和碳纳米管技术相结合的手段,以提高检测精度。本文首先评估了基于嵌入式MOS管的悬臂梁检测技术,然后评估了嵌入式碳纳米管的悬臂梁检测技术,从检测灵敏度分析上比较二者的性能,发现使用碳纳米管技术代替传统的压阻读取方式,能大大提高生物检测的性能。更多还原

【Abstract】 Thanks to the NEMS fabrication technology, cantilever now sees more and more application in the field of biosensing. However, the traditional read-out methods put limit on this technology. Optical read-out method is hard to put into integration and the resolution of piezoresistance read-out method is far from satisfactory in many applications. In order to solve this problem, this thesis brings up a method of embedding a single-walled carbon nanotube on the surface of cantilever serving as stress transducer to raise resolution.This thesis evaluates the performance of a MOSFET embedded cantilever and a CNT embedded one, and compare the resolution of the two. Finally, we found the resolution will rise dramatically if replace piezoresistance with SWCNT in the read-out system.更多还原