【作者】 荆翠妮；

【导师】 古乐；

【作者基本信息】 哈尔滨工业大学 ， 机械设计及理论， 2010， 硕士

【摘要】 在航空航天工业、空间技术迅速发展的今天,用于改造工作表面的新型固体润滑材料应运而生。类金刚石碳膜是一种高硬度、低摩擦系数、高耐磨性及高化学稳定性的新型薄膜材料,作为固体润滑膜在航空航天、微型电子机器等领域越来越受到重视。要保证DLC膜的润滑效果在航空航天苛刻环境下起到作用,需要对DLC膜的一系列性能进行分析研究。本文运用实验、理论分析和软件仿真等方法,利用运动学、接触力学、断裂力学模型,从膜的均匀性、承载能力及摩擦磨损性能三方面系统地研究了陶瓷表面DLC膜的特性,为陶瓷表面DLC膜的润滑研究和应用奠定基础。对膜特性的研究从均匀性入手,氮化硅陶瓷片上可容易地得到均匀DLC膜,但对于陶瓷球,均匀性需要评定。本文结合球研磨过程的均匀性分析,对三沟道单自转盘和单沟道三自转盘两种夹具中球的运动进行运动分析和仿真,验证了三沟道单自转盘夹具中陶瓷球表面沉积DLC薄膜的理论均匀性。将其用于等离子体基离子注入沉积试验中,用沉积DLC膜后陶瓷球的圆度及粗糙度测试值验证均匀性。陶瓷表面薄膜能起到润滑作用的前提是具有一定的膜基结合力。本文利用纳米压痕、划痕试验,从力学角度对仅受法向压力的陶瓷片和陶瓷球表面DLC膜的承载能力,受法向和切向力共同作用的陶瓷片和陶瓷球表面DLC膜的结合力进行研究。同时结合压痕和划痕的形成过程,分析了DLC膜失效过程的力学特征,为陶瓷基体上DLC膜的实际应用提供理论基础。本文最后对DLC膜的常温球盘摩擦磨损行为进行研究。通过试验参数选择,分析陶瓷基体表面DLC膜在大气中不同载荷及不同速度下的摩擦磨损性能及磨损机制的转变,获得了DLC膜承载的临界载荷和速度边界。更多还原

【Abstract】 With the rapid development of aerospace industry and space technology, new solid lubricating materials used for improving surface came into being. Diamond-like carton film is a kind of new film material possessed high hardness, low friction coefficient, high abrasion resistance and stability. As the solid lubricant, many researchers in aerospace and miniature electronic machines field pay more and more attention to it. To ensure the DLC film’s lubrication in aerospace harsh environment, performances of DLC film must be analyzed.Based on experiments, theoretical analysis and the simulation method, using the kinematics, contact mechanics and fracture mechanics, the tribological properties of DLC film were studied which contain film uniformity, carrying capacity and the friction prope rties. These researches provide the foundation of practical application of membrane and the following research on film lubrication.Firstly study the uniformity of film. Si3N4 ceramics chip’s surface can easily get uniform DLC film, but for ceramic balls, uniformity must be assessed. Reference to the analysis to uniformity of grinding ball, do the researches about motion and simulation to the two fixtures. Comparing the balls’movements in two fixtures, one fixture which makes ball free rolling was choosed to deposite DLC film. At last, measure the roundness and roughness of DLC film to test uniformity.As the lubrication film, films’adhesion must be tested. Based on nanometer indentation and scratch tests, analyze the bearing capacities of DLC films on surfaces of ceramics plate and ball which were under only normal pressure and under normal and tangential forces. Analyze the forming process of indentation under normal pressure and nicks under the normal pressure and tangential forces, we ca get the mechanical behavior of failure DLC,which provides theory basis to DLC film’s application.Lastly research about the DLC film’s tribological behavior. Through testing the DLC film’s tribological properties in the atmosphere under different loads and speeds, analyze the wear mechanism under different conditions, and find the critical load and speed which DLC film can bear.更多还原