【作者】 张鲁；

【导师】 寇宝泉；

【作者基本信息】 哈尔滨工业大学 ， 电气工程， 2010， 硕士

【摘要】 永磁同步平面电动机直接利用电磁能产生平面运动,具有出力密度高、低热耗、高精度的特点,相对于传统的二维平面定位装置具有反应快、灵敏度高、随动性好和结构简单等优点,在现代半导体微细加工装备和其它超精密二维平面定位装置中有广阔的应用前景。本文提出一种复合电流驱动的九相永磁同步平面电动机,并进行以下几个方面的研究。首先,建立永磁同步平面电机的数学模型,利用标量磁位和边界条件对平面电动机永磁阵列产生的磁场进行解析,通过等效和简化获得气隙中磁感应强度的表达式,进而依据洛伦兹力法和法拉第电磁感应定律推导出平面电动机所产生的电磁力和空载反电动势的表达式,并建立电机的电压平衡方程。其次,在前面解析的基础上研究该种类型平面电机的设计方法,推导电磁设计流程,确定平面电机的主要尺寸,分析电机性能和结构参数之间的关系,确定动子线圈和定子永磁体的设计思路。借助于Maxwell 3D建立单元平面电机的有限元仿真模型,利用有限元法分别分析铁磁边界、永磁体厚度和线圈截面参数等对电机性能的影响,为电机的优化设计提供理论基础。最后,参照前面的设计方法,设计加工一台样机,并利用实验室现有条件对样机进行实验,测量样机的静磁场、静态推力和空载反电动势波形,并将实验结果和仿真结果进行对比,验证样机设计的合理性。更多还原

【Abstract】 Permanent magnet synchronous planar motors use electromagnetic plane produce planar motion directly, so it have high density, low heat consumption and high precision features. Compared with conventional two-dimensional plane positioning device, planar motors have many advantages such as fast response, high sensitivity, good mobility and simple structure, so it have a broad application prospects in the modern semiconductor micro-fabrication equipment and other ultra-precision two-dimensional plane positioning device. This paper proposed a new permanent magnet synchronous planar motor drived by a current which complex of nine phase.We will research on the following aspects.First, we build the mathematical model of the permanent magnet synchronous planar motor, using the scalar magnetic potential and the boundary conditions analysis the magnetic field which is generated by the permanent magnet array, obtained the expression of the magnetic flux density in the air gap through equivalent and simplified, then we derive the expression of the electromagnetic force and the back electromotive force which are generated by the planar motor according to Los Lenz power law and Faraday’s law of electromagnetic induction. Also the motor voltage equations is established.Secondly, study the design method about planar motor of this type based on previous analytical, derive the magnetic design process, determine the major size of the planar motor, analysis the relationship between the electrical properties and the structural parameters, definite the design ideas of the coil and the permanent magnet. We build the finite element simulation model of the single planar motor through the instrumentality of Maxwell 3D. Using finite element method analysis the impact of magnetic boundary, permanent magnet thickness and coil cross-section parameters on the electrical properties, that provide theory to the optimal design of the motor.Finally, reference to the previous design method, a prototype motor is designed and processed, and experiment on the prototype motor use of laboratory existing conditions, measuring magnetic field, static thrust, and no-load EMF waveforms of the prototype motor. At last the experimental results and simulation results are compared to verify that the prototype design is reasonable.更多还原